JPH0393089U - - Google Patents
Info
- Publication number
- JPH0393089U JPH0393089U JP197390U JP197390U JPH0393089U JP H0393089 U JPH0393089 U JP H0393089U JP 197390 U JP197390 U JP 197390U JP 197390 U JP197390 U JP 197390U JP H0393089 U JPH0393089 U JP H0393089U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suctions
- slidably
- maintain
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 claims description 4
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990001973U JP2535628Y2 (ja) | 1990-01-12 | 1990-01-12 | ウエハー吸着装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990001973U JP2535628Y2 (ja) | 1990-01-12 | 1990-01-12 | ウエハー吸着装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0393089U true JPH0393089U (de) | 1991-09-24 |
JP2535628Y2 JP2535628Y2 (ja) | 1997-05-14 |
Family
ID=31505857
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990001973U Expired - Lifetime JP2535628Y2 (ja) | 1990-01-12 | 1990-01-12 | ウエハー吸着装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2535628Y2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013159430A (ja) * | 2012-02-02 | 2013-08-19 | Honda Motor Co Ltd | ワーク受取り装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62136391A (ja) * | 1985-12-10 | 1987-06-19 | 株式会社東芝 | 把持装置 |
JPS632347A (ja) * | 1986-06-23 | 1988-01-07 | Hitachi Ltd | ハンド |
JPH01138545U (de) * | 1988-03-07 | 1989-09-21 |
-
1990
- 1990-01-12 JP JP1990001973U patent/JP2535628Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62136391A (ja) * | 1985-12-10 | 1987-06-19 | 株式会社東芝 | 把持装置 |
JPS632347A (ja) * | 1986-06-23 | 1988-01-07 | Hitachi Ltd | ハンド |
JPH01138545U (de) * | 1988-03-07 | 1989-09-21 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013159430A (ja) * | 2012-02-02 | 2013-08-19 | Honda Motor Co Ltd | ワーク受取り装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2535628Y2 (ja) | 1997-05-14 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |