JPH0393054U - - Google Patents
Info
- Publication number
- JPH0393054U JPH0393054U JP1989151601U JP15160189U JPH0393054U JP H0393054 U JPH0393054 U JP H0393054U JP 1989151601 U JP1989151601 U JP 1989151601U JP 15160189 U JP15160189 U JP 15160189U JP H0393054 U JPH0393054 U JP H0393054U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- processing
- transport arm
- processing device
- wiping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Feeding Of Workpieces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989151601U JPH0393054U (US07655688-20100202-C00548.png) | 1989-12-29 | 1989-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989151601U JPH0393054U (US07655688-20100202-C00548.png) | 1989-12-29 | 1989-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0393054U true JPH0393054U (US07655688-20100202-C00548.png) | 1991-09-24 |
Family
ID=31697896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989151601U Pending JPH0393054U (US07655688-20100202-C00548.png) | 1989-12-29 | 1989-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0393054U (US07655688-20100202-C00548.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016016525A (ja) * | 2014-07-04 | 2016-02-01 | 三星ダイヤモンド工業株式会社 | 基板加工装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61136366A (ja) * | 1984-12-07 | 1986-06-24 | Hitachi Ltd | 感熱多色記録装置 |
| JPH01140940A (ja) * | 1987-11-27 | 1989-06-02 | Nippei Toyama Corp | ワーク搬入出装置 |
-
1989
- 1989-12-29 JP JP1989151601U patent/JPH0393054U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61136366A (ja) * | 1984-12-07 | 1986-06-24 | Hitachi Ltd | 感熱多色記録装置 |
| JPH01140940A (ja) * | 1987-11-27 | 1989-06-02 | Nippei Toyama Corp | ワーク搬入出装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016016525A (ja) * | 2014-07-04 | 2016-02-01 | 三星ダイヤモンド工業株式会社 | 基板加工装置 |
