JPH0392767U - - Google Patents
Info
- Publication number
- JPH0392767U JPH0392767U JP15295089U JP15295089U JPH0392767U JP H0392767 U JPH0392767 U JP H0392767U JP 15295089 U JP15295089 U JP 15295089U JP 15295089 U JP15295089 U JP 15295089U JP H0392767 U JPH0392767 U JP H0392767U
- Authority
- JP
- Japan
- Prior art keywords
- hearth
- source
- recess
- evaporation
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図はこの考案の一実施例の蒸発源の断面図
である。第２図は従来例の蒸発源の断面図である
。第３図は第２図の蒸発源で発生する不具合につ
いて説明する断面図である。
１……ハース、２……凹部、４……ソース、７
……リング。
FIG. 1 is a sectional view of an evaporation source according to an embodiment of this invention. FIG. 2 is a sectional view of a conventional evaporation source. FIG. 3 is a sectional view illustrating a problem occurring in the evaporation source of FIG. 2. 1... Hearth, 2... Recess, 4... Source, 7
……ring.
Claims (1)
収容されたソースとを備えてなる蒸発源において
、前記ハースの凹部の上端内壁に沿つて、ハース
およびソースよりも高融点のリングを介在したこ
とを特徴とする蒸着装置の蒸発源。 In an evaporation source comprising a hearth having a recess on the upper surface and a source housed in the hearth, a ring having a higher melting point than the hearth and the source is interposed along the inner wall of the upper end of the recess of the hearth. Characteristic evaporation source of evaporation equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15295089U JPH0392767U (en) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15295089U JPH0392767U (en) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0392767U true JPH0392767U (en) | 1991-09-20 |
Family
ID=31699186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15295089U Pending JPH0392767U (en) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0392767U (en) |
-
1989
- 1989-12-28 JP JP15295089U patent/JPH0392767U/ja active Pending