JPH0390445U - - Google Patents
Info
- Publication number
- JPH0390445U JPH0390445U JP15235589U JP15235589U JPH0390445U JP H0390445 U JPH0390445 U JP H0390445U JP 15235589 U JP15235589 U JP 15235589U JP 15235589 U JP15235589 U JP 15235589U JP H0390445 U JPH0390445 U JP H0390445U
- Authority
- JP
- Japan
- Prior art keywords
- holding groove
- groove pitch
- carrier
- boat
- pusher
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000000969 carrier Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989152355U JPH0648851Y2 (ja) | 1989-12-27 | 1989-12-27 | ウェーハ立替機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989152355U JPH0648851Y2 (ja) | 1989-12-27 | 1989-12-27 | ウェーハ立替機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0390445U true JPH0390445U (en, 2012) | 1991-09-13 |
| JPH0648851Y2 JPH0648851Y2 (ja) | 1994-12-12 |
Family
ID=31698623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989152355U Expired - Lifetime JPH0648851Y2 (ja) | 1989-12-27 | 1989-12-27 | ウェーハ立替機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648851Y2 (en, 2012) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7443229B1 (en) | 2001-04-24 | 2008-10-28 | Picor Corporation | Active filtering |
| US6985341B2 (en) | 2001-04-24 | 2006-01-10 | Vlt, Inc. | Components having actively controlled circuit elements |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61280630A (ja) * | 1985-06-06 | 1986-12-11 | Toshiba Corp | 半導体ウエハ移送装置 |
-
1989
- 1989-12-27 JP JP1989152355U patent/JPH0648851Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61280630A (ja) * | 1985-06-06 | 1986-12-11 | Toshiba Corp | 半導体ウエハ移送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648851Y2 (ja) | 1994-12-12 |