JPH0390081U - - Google Patents

Info

Publication number
JPH0390081U
JPH0390081U JP15235089U JP15235089U JPH0390081U JP H0390081 U JPH0390081 U JP H0390081U JP 15235089 U JP15235089 U JP 15235089U JP 15235089 U JP15235089 U JP 15235089U JP H0390081 U JPH0390081 U JP H0390081U
Authority
JP
Japan
Prior art keywords
probe card
substrate
ring
opening
probes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15235089U
Other languages
English (en)
Japanese (ja)
Other versions
JP2524308Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989152350U priority Critical patent/JP2524308Y2/ja
Priority to US07/548,401 priority patent/US5055778A/en
Priority to US07/735,214 priority patent/US5134365A/en
Publication of JPH0390081U publication Critical patent/JPH0390081U/ja
Application granted granted Critical
Publication of JP2524308Y2 publication Critical patent/JP2524308Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1989152350U 1989-07-11 1989-12-27 プローブカード Expired - Lifetime JP2524308Y2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1989152350U JP2524308Y2 (ja) 1989-12-27 1989-12-27 プローブカード
US07/548,401 US5055778A (en) 1989-10-02 1990-07-05 Probe card in which contact pressure and relative position of each probe end are correctly maintained
US07/735,214 US5134365A (en) 1989-07-11 1991-07-24 Probe card in which contact pressure and relative position of each probe end are correctly maintained

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989152350U JP2524308Y2 (ja) 1989-12-27 1989-12-27 プローブカード

Publications (2)

Publication Number Publication Date
JPH0390081U true JPH0390081U (nl) 1991-09-13
JP2524308Y2 JP2524308Y2 (ja) 1997-01-29

Family

ID=31698619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989152350U Expired - Lifetime JP2524308Y2 (ja) 1989-07-11 1989-12-27 プローブカード

Country Status (1)

Country Link
JP (1) JP2524308Y2 (nl)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998010298A1 (fr) * 1996-09-02 1998-03-12 Seiko Epson Corporation Dispositif d'inspection d'un panneau d'affichage a cristaux liquides, procede d'inspection d'un panneau d'affichage a cristaux liquides et procede de fabrication d'un panneau d'affichage a cristaux liquides

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59135739A (ja) * 1983-01-25 1984-08-04 Toshiba Corp 半導体素子の測定装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59135739A (ja) * 1983-01-25 1984-08-04 Toshiba Corp 半導体素子の測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998010298A1 (fr) * 1996-09-02 1998-03-12 Seiko Epson Corporation Dispositif d'inspection d'un panneau d'affichage a cristaux liquides, procede d'inspection d'un panneau d'affichage a cristaux liquides et procede de fabrication d'un panneau d'affichage a cristaux liquides

Also Published As

Publication number Publication date
JP2524308Y2 (ja) 1997-01-29

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EXPY Cancellation because of completion of term