JPH0390048U - - Google Patents
Info
- Publication number
- JPH0390048U JPH0390048U JP15284689U JP15284689U JPH0390048U JP H0390048 U JPH0390048 U JP H0390048U JP 15284689 U JP15284689 U JP 15284689U JP 15284689 U JP15284689 U JP 15284689U JP H0390048 U JPH0390048 U JP H0390048U
- Authority
- JP
- Japan
- Prior art keywords
- output
- vacuum
- detection means
- vacuum level
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Examining Or Testing Airtightness (AREA)
Description
第１図〜第３図は本考案の一実施例を示し、第
１図はブロツク図、第２図は適用対象の説明図、
第３図は第１図中各部において観測される概略的
な電圧波形図である。第４図は従来例を示す第１
図相当のブロツク図である。
７…真空度検出手段、８…ピークホールド回路
、９…比較出力回路、Ａ…真空度信号（現在値）
、Ｂ…真空度信号（最高値）、Ｃ…差、Ｄ…基準
値、Ｅ…漏洩検知信号。
Figures 1 to 3 show an embodiment of the present invention, with Figure 1 being a block diagram and Figure 2 being an explanatory diagram of the object to which it is applied.
FIG. 3 is a schematic diagram of voltage waveforms observed at various parts in FIG. 1. Figure 4 shows the first example of a conventional example.
FIG. 7... Vacuum degree detection means, 8... Peak hold circuit, 9... Comparison output circuit, A... Vacuum degree signal (current value)
, B...Vacuum degree signal (maximum value), C...Difference, D...Reference value, E...Leakage detection signal.
Claims (1)
空度検出手段と、この真空度検出手段から出力さ
れる真空度信号を入力し常にその最高値を更新し
ながら保持するピークホールド回路と、このピー
クホールド回路に保持されている真空度信号の最
高値と前記真空度検出手段から現に出力されるそ
の現在値とをともに入力しその差が基準値を上回
つたときに漏洩検知信号を出力する比較出力回路
とを具備してなることを特徴とする真空漏洩検出
装置。 A vacuum level detection means installed facing the atmosphere where leakage detection is required, a peak hold circuit that inputs the vacuum level signal output from the vacuum level detection means and holds it while constantly updating the highest value, A comparison in which the highest value of the vacuum degree signal held in the hold circuit and the current value actually output from the vacuum degree detection means are input together, and a leakage detection signal is output when the difference exceeds a reference value. A vacuum leak detection device characterized by comprising an output circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15284689U JPH0390048U (en) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15284689U JPH0390048U (en) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0390048U true JPH0390048U (en) | 1991-09-13 |
Family
ID=31699085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15284689U Pending JPH0390048U (en) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0390048U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008205041A (en) * | 2007-02-16 | 2008-09-04 | Toshiba Corp | Electronic device and thermally conductive member |
-
1989
- 1989-12-28 JP JP15284689U patent/JPH0390048U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008205041A (en) * | 2007-02-16 | 2008-09-04 | Toshiba Corp | Electronic device and thermally conductive member |
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