JPH0389160U - - Google Patents
Info
- Publication number
- JPH0389160U JPH0389160U JP15215289U JP15215289U JPH0389160U JP H0389160 U JPH0389160 U JP H0389160U JP 15215289 U JP15215289 U JP 15215289U JP 15215289 U JP15215289 U JP 15215289U JP H0389160 U JPH0389160 U JP H0389160U
- Authority
- JP
- Japan
- Prior art keywords
- rotation
- rotary shaft
- magnetically coupled
- rotary
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図乃至第４図は本考案の実施例を説明する
ためのもので、第１図は実施例１の縦断面図、第
２図は第１図のＡ−Ａ線に沿う拡大断面図、第３
図は実施例の２つの縦断面図、第４図は実施例３
の縦断面図である。第５図は従来の磁気結合回転
導入機の縦断面図、第６図は第５図のＢ−Ｂ線に
沿う拡大断面図である。
２……隔壁、ｍ……外部空間、ｎ……内部空間
、３……外部マグネツト、５……回転軸、７……
内部マグネツト、２０……回転部、２１……セン
サ部、２２……回転軸動作モニタ手段、３１……
センサ部。
Figures 1 to 4 are for explaining embodiments of the present invention; Figure 1 is a longitudinal sectional view of Embodiment 1, and Figure 2 is an enlarged sectional view taken along line A-A in Figure 1. , 3rd
The figures are two longitudinal cross-sectional views of the embodiment, and FIG. 4 is the embodiment 3.
FIG. FIG. 5 is a longitudinal cross-sectional view of a conventional magnetic coupling rotation introduction machine, and FIG. 6 is an enlarged cross-sectional view taken along the line B--B in FIG. 5. 2... Partition wall, m... External space, n... Inner space, 3... External magnet, 5... Rotating shaft, 7...
Internal magnet, 20...Rotating part, 21...Sensor part, 22...Rotating shaft operation monitoring means, 31...
Sensor part.
Claims (1)
回転で、隔壁の内部空間に配置された回転軸に固
定されて前記外部マグネツトに非接触で磁気結合
された内部マグネツトを追従回転させて前記回転
軸を回転させるようにしたものにおいて、 前記隔壁の外部空間に、前記回転軸側に磁気結
合されて回転軸の回転に追従して回転する回転部
と、この回転部の回転を検知するセンサ部からな
る回転軸動作モニタ手段を付設したことを特徴と
する磁気結合型回転導入機。[Claims for Utility Model Registration] Rotation of an external magnet disposed in the external space of the partition wall causes an internal magnet fixed to a rotating shaft disposed in the internal space of the partition wall and magnetically coupled to the external magnet in a non-contact manner. The rotary shaft is rotated by following rotation, and the rotary portion is magnetically coupled to the rotary shaft side and rotates following the rotation of the rotary shaft, and the rotary portion is magnetically coupled to the rotary shaft side and rotates in accordance with the rotation of the rotary shaft. 1. A magnetically coupled rotation introduction machine, characterized in that it is equipped with rotation shaft operation monitoring means consisting of a sensor section that detects rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15215289U JPH0389160U (en) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15215289U JPH0389160U (en) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0389160U true JPH0389160U (en) | 1991-09-11 |
Family
ID=31698427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15215289U Pending JPH0389160U (en) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0389160U (en) |
-
1989
- 1989-12-28 JP JP15215289U patent/JPH0389160U/ja active Pending