JPH0388330U - - Google Patents
Info
- Publication number
- JPH0388330U JPH0388330U JP14928289U JP14928289U JPH0388330U JP H0388330 U JPH0388330 U JP H0388330U JP 14928289 U JP14928289 U JP 14928289U JP 14928289 U JP14928289 U JP 14928289U JP H0388330 U JPH0388330 U JP H0388330U
- Authority
- JP
- Japan
- Prior art keywords
- section
- liquid phase
- epitaxial growth
- growth apparatus
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- 239000007791 liquid phase Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910002804 graphite Inorganic materials 0.000 claims 1
- 239000010439 graphite Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14928289U JPH0388330U (cs) | 1989-12-27 | 1989-12-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14928289U JPH0388330U (cs) | 1989-12-27 | 1989-12-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0388330U true JPH0388330U (cs) | 1991-09-10 |
Family
ID=31695691
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14928289U Pending JPH0388330U (cs) | 1989-12-27 | 1989-12-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0388330U (cs) |
-
1989
- 1989-12-27 JP JP14928289U patent/JPH0388330U/ja active Pending
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