JPH01102161U - - Google Patents
Info
- Publication number
- JPH01102161U JPH01102161U JP19480087U JP19480087U JPH01102161U JP H01102161 U JPH01102161 U JP H01102161U JP 19480087 U JP19480087 U JP 19480087U JP 19480087 U JP19480087 U JP 19480087U JP H01102161 U JPH01102161 U JP H01102161U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- substrate
- sic
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910052799 carbon Inorganic materials 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19480087U JPH01102161U (cs) | 1987-12-24 | 1987-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19480087U JPH01102161U (cs) | 1987-12-24 | 1987-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01102161U true JPH01102161U (cs) | 1989-07-10 |
Family
ID=31485508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19480087U Pending JPH01102161U (cs) | 1987-12-24 | 1987-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01102161U (cs) |
-
1987
- 1987-12-24 JP JP19480087U patent/JPH01102161U/ja active Pending
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