JPH038809B2 - - Google Patents

Info

Publication number
JPH038809B2
JPH038809B2 JP59274805A JP27480584A JPH038809B2 JP H038809 B2 JPH038809 B2 JP H038809B2 JP 59274805 A JP59274805 A JP 59274805A JP 27480584 A JP27480584 A JP 27480584A JP H038809 B2 JPH038809 B2 JP H038809B2
Authority
JP
Japan
Prior art keywords
tubular membrane
hydrogen
membrane
purity
stainless steel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59274805A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61157326A (ja
Inventor
Tadahiro Oomi
Toshio Hayashi
Yoshasu Maehane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Shinku Gijutsu KK filed Critical Nihon Shinku Gijutsu KK
Priority to JP59274805A priority Critical patent/JPS61157326A/ja
Publication of JPS61157326A publication Critical patent/JPS61157326A/ja
Publication of JPH038809B2 publication Critical patent/JPH038809B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)
  • Hydrogen, Water And Hydrids (AREA)
JP59274805A 1984-12-28 1984-12-28 高純度水素精製装置 Granted JPS61157326A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59274805A JPS61157326A (ja) 1984-12-28 1984-12-28 高純度水素精製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59274805A JPS61157326A (ja) 1984-12-28 1984-12-28 高純度水素精製装置

Publications (2)

Publication Number Publication Date
JPS61157326A JPS61157326A (ja) 1986-07-17
JPH038809B2 true JPH038809B2 (enrdf_load_stackoverflow) 1991-02-07

Family

ID=17546808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59274805A Granted JPS61157326A (ja) 1984-12-28 1984-12-28 高純度水素精製装置

Country Status (1)

Country Link
JP (1) JPS61157326A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61157326A (ja) 1986-07-17

Similar Documents

Publication Publication Date Title
KR100306016B1 (ko) 기체또는액체를여과,분리,정화하거나또는촉매변환하기위한모듈
US2961062A (en) Large surface area hydrogen permeation cell
US6183542B1 (en) Method and apparatus for purifying hydrogen
JP2991609B2 (ja) ガス分離体と金属との接合体および水素ガス分離装置
US3368329A (en) Hydrogen purification apparatus
US3238704A (en) Diffusion purification of gases
SE526425C2 (sv) Membranseparationsmodul, membranseperationskonstruktion, separationsförfarande samt förfarande för att tillverka en membranseparationskonstruktion
JPH038810B2 (enrdf_load_stackoverflow)
JPH038812B2 (enrdf_load_stackoverflow)
JPH038809B2 (enrdf_load_stackoverflow)
JPH038811B2 (enrdf_load_stackoverflow)
EP0106523A2 (en) Diffusion cell
JPS6177602A (ja) 高純度水素精製装置
JP2813274B2 (ja) ガス用フィルター装置
JPH07112111A (ja) 水素ガス分離装置
CN86107794A (zh) 高压放电灯
JP2805315B2 (ja) コールドトラップ
JP3273641B2 (ja) 水素ガス精製装置
EP0657912B1 (en) Process for connection of a molybdenum foil to a molybdenum lead portion and method of producing a hermetically enclosed part of a lamp using the process
JPS6351918A (ja) 半導体製造装置用ガス精製器
CN116692771A (zh) 一种外压式高纯氢气净化器及其制备方法
JP3076812B2 (ja) 精密濾過用金属フィルターの製造方法
JPH086175B2 (ja) 管材内面スパッタ用ターゲット
JP2009228635A (ja) 排気ガス浄化装置
JPH11132039A (ja) 二重排気管の製造方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term