JPH0388024U - - Google Patents

Info

Publication number
JPH0388024U
JPH0388024U JP14866889U JP14866889U JPH0388024U JP H0388024 U JPH0388024 U JP H0388024U JP 14866889 U JP14866889 U JP 14866889U JP 14866889 U JP14866889 U JP 14866889U JP H0388024 U JPH0388024 U JP H0388024U
Authority
JP
Japan
Prior art keywords
bearing
blades
bearing device
touchdown
solid lubricant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14866889U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14866889U priority Critical patent/JPH0388024U/ja
Publication of JPH0388024U publication Critical patent/JPH0388024U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図はタツチダウン軸受が組み込まれたター
ボ分子ポンプの縦断面図、第2図は本考案のタツ
チダウン軸受の断面図、第3図は従来の軸受の断
面図である。 符号の説明、2……ケーシング、2′……内側
ケーシング、3……軸、4……ロータ、5,6…
…タツチダウン軸受、7,8……電磁石、9,1
0……グレード、12,12a……内輪、13,
13a……外輪、14,14a……玉、15……
固体潤滑剤被膜。
FIG. 1 is a longitudinal cross-sectional view of a turbomolecular pump incorporating a touchdown bearing, FIG. 2 is a cross-sectional view of the touchdown bearing of the present invention, and FIG. 3 is a cross-sectional view of a conventional bearing. Explanation of symbols, 2...Casing, 2'...Inner casing, 3...Shaft, 4...Rotor, 5, 6...
...Touch-down bearing, 7, 8...Electromagnet, 9,1
0...Grade, 12, 12a...Inner ring, 13,
13a... Outer ring, 14, 14a... Ball, 15...
Solid lubricant film.

Claims (1)

【実用新案登録請求の範囲】 (1) 複数枚のブレードを有する回転側部材と、
前ブレード間に位置する様に配設された複数枚の
ブレードを有する固定側部材と、前記回転側部材
を回動自在に支持した磁気軸受と、該磁気軸受が
停電などによつて磁気軸受としての浮上機能が失
われた際に、前記両部材に配設されたブレードが
互に接触することを防止するタツチダウン軸受と
を備えた軸受装置において、前記タツチダウン軸
受は、少なくとも外輪内輪玉の全面が固体潤滑剤
にて被覆されており、かつ内輪及び外輪の両方又
はいずれか一方のみぞ半径を玉径の56%をこえ
65%未満の範囲に設定された軸受装置。 (2) タツチダウン軸受に被膜された固体潤滑剤
が鉛及び二硫化モリブデンである請求項(1)に記
載の軸受装置。 (3) タツチダウン軸受の内輪、外輪及び転動体
がマルテンサイト系ステンレス鋼から成る請求項
(1),(2)に記載の軸受装置。
[Claims for Utility Model Registration] (1) A rotating member having a plurality of blades;
A fixed side member having a plurality of blades arranged to be located between the front blades, a magnetic bearing rotatably supporting the rotating side member, and the magnetic bearing can be used as a magnetic bearing due to a power outage or the like. In a bearing device comprising a touchdown bearing that prevents the blades disposed on both members from coming into contact with each other when the floating function of A bearing device that is coated with a solid lubricant and has a groove radius of both or one of the inner ring and outer ring set within a range of more than 56% and less than 65% of the ball diameter. (2) The bearing device according to claim (1), wherein the solid lubricant coated on the touchdown bearing is lead and molybdenum disulfide. (3) A claim in which the inner ring, outer ring, and rolling elements of the touchdown bearing are made of martensitic stainless steel.
Bearing device described in (1) and (2).
JP14866889U 1989-12-26 1989-12-26 Pending JPH0388024U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14866889U JPH0388024U (en) 1989-12-26 1989-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14866889U JPH0388024U (en) 1989-12-26 1989-12-26

Publications (1)

Publication Number Publication Date
JPH0388024U true JPH0388024U (en) 1991-09-09

Family

ID=31695111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14866889U Pending JPH0388024U (en) 1989-12-26 1989-12-26

Country Status (1)

Country Link
JP (1) JPH0388024U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006059651A1 (en) * 2004-12-01 2006-06-08 Jtekt Corporation Touchdown bearing
JP2006183867A (en) * 2004-12-01 2006-07-13 Jtekt Corp Touchdown bearing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006059651A1 (en) * 2004-12-01 2006-06-08 Jtekt Corporation Touchdown bearing
JP2006183867A (en) * 2004-12-01 2006-07-13 Jtekt Corp Touchdown bearing
JP4539861B2 (en) * 2004-12-01 2010-09-08 株式会社ジェイテクト Touchdown bearing

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