JPH038506B2 - - Google Patents
Info
- Publication number
- JPH038506B2 JPH038506B2 JP56168558A JP16855881A JPH038506B2 JP H038506 B2 JPH038506 B2 JP H038506B2 JP 56168558 A JP56168558 A JP 56168558A JP 16855881 A JP16855881 A JP 16855881A JP H038506 B2 JPH038506 B2 JP H038506B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- humidity
- humidity sensor
- sensor
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 11
- 230000005684 electric field Effects 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000007423 decrease Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- -1 hydrogen ions Chemical class 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229920003055 poly(ester-imide) Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16855881A JPS5870153A (ja) | 1981-10-23 | 1981-10-23 | 温・湿度検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16855881A JPS5870153A (ja) | 1981-10-23 | 1981-10-23 | 温・湿度検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5870153A JPS5870153A (ja) | 1983-04-26 |
JPH038506B2 true JPH038506B2 (US06486227-20021126-C00005.png) | 1991-02-06 |
Family
ID=15870248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16855881A Granted JPS5870153A (ja) | 1981-10-23 | 1981-10-23 | 温・湿度検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5870153A (US06486227-20021126-C00005.png) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0679002B2 (ja) * | 1987-07-02 | 1994-10-05 | インダストリアル・テクノロジー・リサーチ・インステイテユート | ポリイミド電気容量式湿度感知素子 |
WO2015022891A1 (ja) | 2013-08-13 | 2015-02-19 | 株式会社村田製作所 | 温湿度センサ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55155239A (en) * | 1979-05-22 | 1980-12-03 | Toshiba Corp | Temperature/humidity detector |
JPS5629151A (en) * | 1979-03-29 | 1981-03-23 | Vaisala Oy | Controller for humidity pickup |
-
1981
- 1981-10-23 JP JP16855881A patent/JPS5870153A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5629151A (en) * | 1979-03-29 | 1981-03-23 | Vaisala Oy | Controller for humidity pickup |
JPS55155239A (en) * | 1979-05-22 | 1980-12-03 | Toshiba Corp | Temperature/humidity detector |
Also Published As
Publication number | Publication date |
---|---|
JPS5870153A (ja) | 1983-04-26 |
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