JPH038431U - - Google Patents

Info

Publication number
JPH038431U
JPH038431U JP6740789U JP6740789U JPH038431U JP H038431 U JPH038431 U JP H038431U JP 6740789 U JP6740789 U JP 6740789U JP 6740789 U JP6740789 U JP 6740789U JP H038431 U JPH038431 U JP H038431U
Authority
JP
Japan
Prior art keywords
electrode
plate
opposite
electrode plate
gas holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6740789U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6740789U priority Critical patent/JPH038431U/ja
Publication of JPH038431U publication Critical patent/JPH038431U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第1図は一実施を示す概略断面図、第2図は同
実施例における電極板を示す平面図、第3図は同
実施例における回転板を示す平面図、第4図は同
実施例におけるチヤンバと回転軸との接点を示す
断面図、第5図及び第6図はそれぞれ同実施例に
おおいて電極板と回転板の孔の重なり部分の配置
を示す平面図、第7図AからCはそれぞれ同実施
例におけるウエハ面内のエツチング速度分布を示
す図、第8図は従来のドライエツチング装置の上
部電極を示す概略断面図、第9図は従来の装置に
おける上部電極を示す平面図である。 11……チヤンバ、12……電極板、14……
電極板の孔、15……回転板、16……回転板の
孔、17……回転軸、18……接点、19……回
転制御装置。

Claims (1)

    【実用新案登録請求の範囲】
  1. 平行平板型ドライエツチング装置で下部電極と
    対向して設けられた上部電極において、下部電極
    と対向して固定され、複数個のガス孔があけられ
    た電極板と、前記電極板に対向し、かつ、接近し
    て設けられ、前記電極板の中心を回転中心として
    回転可能に支持され、複数個のガス孔があけられ
    た回転板とを備えていることを特徴とする上部電
    極。
JP6740789U 1989-06-09 1989-06-09 Pending JPH038431U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6740789U JPH038431U (ja) 1989-06-09 1989-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6740789U JPH038431U (ja) 1989-06-09 1989-06-09

Publications (1)

Publication Number Publication Date
JPH038431U true JPH038431U (ja) 1991-01-28

Family

ID=31600951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6740789U Pending JPH038431U (ja) 1989-06-09 1989-06-09

Country Status (1)

Country Link
JP (1) JPH038431U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001122587A (ja) * 1999-10-21 2001-05-08 Taisei Corp 壁継ぎ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001122587A (ja) * 1999-10-21 2001-05-08 Taisei Corp 壁継ぎ

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