JPH0383675U - - Google Patents
Info
- Publication number
- JPH0383675U JPH0383675U JP14451889U JP14451889U JPH0383675U JP H0383675 U JPH0383675 U JP H0383675U JP 14451889 U JP14451889 U JP 14451889U JP 14451889 U JP14451889 U JP 14451889U JP H0383675 U JPH0383675 U JP H0383675U
- Authority
- JP
- Japan
- Prior art keywords
- board
- connecting rod
- mounting table
- center
- mounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000576 coating method Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 claims 1
- 239000012530 fluid Substances 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Description
第１図は、本考案の一実施例を示す断面図、第
２図はその平面図（但し、チヤンバーは省略して
ある）、第３図ないし第５図は、同実施例を用い
た塗布工程を順に示す断面図、第６図は従来例を
示す断面図、第７図ないし第９図は、同従来例を
用いた塗布工程を順に示す断面図である。
１……基板、２……載置台、３……連接棒、４
……チヤンバー、５……デイスペンサー、６……
近接材、７……支持棒、８……流動体、９……は
ね返つた流動体。
Fig. 1 is a sectional view showing one embodiment of the present invention, Fig. 2 is a plan view thereof (however, the chamber is omitted), and Figs. 3 to 5 are coatings using the same embodiment. FIG. 6 is a cross-sectional view showing a conventional example, and FIGS. 7 to 9 are cross-sectional views sequentially showing the coating process using the conventional example. 1... Board, 2... Mounting table, 3... Connecting rod, 4
...Chamber, 5...Dispenser, 6...
Adjacent material, 7...support rod, 8...fluid, 9...repelled fluid.
Claims (1)
で連接してなる連接棒と、連接棒を回転する回転
装置と、基板上１mm以下平行に離間して載置台と
同期しない基板幅より長く回転のほぼ中心を通過
する近接材よりなる回転塗布装置。 A mounting table on which the board is to be placed, a connecting rod that is connected at the lower center of the mounting board, a rotating device that rotates the connecting rod, and a board width that is spaced parallel to the board by 1 mm or less and is not synchronized with the mounting table. A rotary coating device consisting of a long, close-in material that passes through almost the center of rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14451889U JPH0383675U (en) | 1989-12-15 | 1989-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14451889U JPH0383675U (en) | 1989-12-15 | 1989-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0383675U true JPH0383675U (en) | 1991-08-26 |
Family
ID=31691210
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14451889U Pending JPH0383675U (en) | 1989-12-15 | 1989-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0383675U (en) |
-
1989
- 1989-12-15 JP JP14451889U patent/JPH0383675U/ja active Pending
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