JPH0381626U - - Google Patents
Info
- Publication number
- JPH0381626U JPH0381626U JP14287389U JP14287389U JPH0381626U JP H0381626 U JPH0381626 U JP H0381626U JP 14287389 U JP14287389 U JP 14287389U JP 14287389 U JP14287389 U JP 14287389U JP H0381626 U JPH0381626 U JP H0381626U
- Authority
- JP
- Japan
- Prior art keywords
- vicinity
- inert gas
- wafer
- unloader
- loader
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004528 spin coating Methods 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000012299 nitrogen atmosphere Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989142873U JPH082999Y2 (ja) | 1989-12-11 | 1989-12-11 | スピンコート装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989142873U JPH082999Y2 (ja) | 1989-12-11 | 1989-12-11 | スピンコート装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0381626U true JPH0381626U (US07923587-20110412-C00022.png) | 1991-08-21 |
| JPH082999Y2 JPH082999Y2 (ja) | 1996-01-29 |
Family
ID=31689681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989142873U Expired - Lifetime JPH082999Y2 (ja) | 1989-12-11 | 1989-12-11 | スピンコート装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH082999Y2 (US07923587-20110412-C00022.png) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58143866A (ja) * | 1982-02-17 | 1983-08-26 | Dainippon Screen Mfg Co Ltd | レジスト剤塗布装置 |
| JPS62128539A (ja) * | 1985-11-29 | 1987-06-10 | Matsushita Electric Ind Co Ltd | ウエハの搬送装置 |
| JPS62198122A (ja) * | 1986-02-26 | 1987-09-01 | Hitachi Ltd | 半導体処理装置 |
| JPS63318738A (ja) * | 1987-06-15 | 1988-12-27 | コンバツク ゲーエムベーハー | 半導体素子の製造用ウエーハの処理装置 |
| JPS6453421A (en) * | 1987-08-24 | 1989-03-01 | Mitsubishi Electric Corp | Resist coating device |
-
1989
- 1989-12-11 JP JP1989142873U patent/JPH082999Y2/ja not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58143866A (ja) * | 1982-02-17 | 1983-08-26 | Dainippon Screen Mfg Co Ltd | レジスト剤塗布装置 |
| JPS62128539A (ja) * | 1985-11-29 | 1987-06-10 | Matsushita Electric Ind Co Ltd | ウエハの搬送装置 |
| JPS62198122A (ja) * | 1986-02-26 | 1987-09-01 | Hitachi Ltd | 半導体処理装置 |
| JPS63318738A (ja) * | 1987-06-15 | 1988-12-27 | コンバツク ゲーエムベーハー | 半導体素子の製造用ウエーハの処理装置 |
| JPS6453421A (en) * | 1987-08-24 | 1989-03-01 | Mitsubishi Electric Corp | Resist coating device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH082999Y2 (ja) | 1996-01-29 |
