JPH038145A - Production of stamper for reproduction of optical disk - Google Patents

Abstract

PURPOSE:To produce the high-quality stamper having less defects by peeling a mother from a master, then subjecting the mother surface to a hydrophilic treatment, peeling the son from the mother and subjecting the son surface to the hydrophilic treatment, thereby forming the hydrophilic mother and son. CONSTITUTION:A conductive film is formed on the pregroove patterns formed on a glass substrate and Ni plating is executed with this film as a cathode. The substrate is then peeled to obtain the master. After this master is subjected to a peeling film treatment, the master is subjected to Ni plating and the plating is peeled from the master to obtain the mother. The mother is thereafter subjected to the hydrophilic treatment by using isopropyl alcohol and is further subjected to the peeling film treatment; thereafter, the mother is subjected to the Ni plating and the plating is peeled from the mother to obtain the son. The son is subjected to the hydrophilic treatment by the isopropyl alcohol after the peeling and is rinsed and dried. The surfaces of the mother and the son are substd. from the water repellent to hydrophilic surfaces in this way, by which the high-quality stamper having less defects is obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a stamper for duplicating optical discs.

2. Description of the Related Art Conventionally, the method for manufacturing a stamper for optical disk duplication is to form a conductive film on a pregroup pattern formed on a glass substrate, and then use the conductive film as a cathode to conduct N1.
Obtain a master by peeling off the plated glass substrate,
After this master is treated with a release coating, it is plated with Ni and peeled from the master to obtain a mother, and after this mother is treated with a release coating, it is plated with Ni and peeled from the mother to obtain a stamper. but,
For example, JP-A-60-197959, JP-A-61-
This is known from Japanese Patent No. 221392 and the like.

In this conventional method, after the mother is peeled off from the master and after the sun is peeled off from the mother, the surfaces of the mother and the sun are washed with water. In this case, the surfactant, which is a bit prevention agent (surface tension reducing agent) in the plating bath, has hydrophobic groups adsorbed to the surfaces of the master and mother that are originally to be replicated, and is hydrophilic to the plating solution. The base is protruding. Mother and sun will be replicated on this surface by plating.

Problems to be Solved by the Invention However, if we consider the case where a mother is replicated from a master, for example, as the mother is plated onto the hydrophilic groups of the surfactant adsorbed on the master, the mother after peeling is Because the hydrophilic groups of the surfactant are adsorbed on the surface, there are hydrophobic groups on the surface, making it water repellent.

This phenomenon will be explained with reference to FIG.

First, the surfactant in the plating bath is usually
As shown in , in order to direct the hydrophilic group shown by ■ toward the aqueous solution side,
Hydrophobic groups indicated by ■ are adsorbed on the surface of master 1 made of Ni. The illustrated example uses lauric acid ester sodium salt (C,,H,,-03O,-Na) as a surfactant.
), the hydrophobic group (■) is an alkyl group such as CI I H11, the hydrophilic group (■) is OSO, and (■) represents Na. As shown in the figure, such a surfactant is an anionic surfactant, and when dissolved in water, the hydrophobic group becomes an anion. Master 1
When replicating Mother 2 from the mother 2, the outermost surface of the mother 2 is adsorbed to the anion with a hydrophobic group of the surfactant (the anion part is hydrophilic), so after replication, the water on the surface of the peeled mother 2 and On the contacting side, as shown in FIG. 2(b), the hydrophobic group protrudes and becomes water repellent.

Therefore, the washing water cannot be completely removed in the drying process and remains as a stain, resulting in many defects.

This also applies to the process of duplicating a son from a mother.

Means for Solving the Problem After forming a conductive film on a pre-group pattern formed on a glass substrate, a master is obtained by peeling off the Ni-plated glass substrate using this conductive film as a cathode, and this master is A method for producing a stamper for optical disk duplication, in which a mother is obtained by subjecting the mother to H release coating, followed by N1 plating and peeling from the master, and after the release coating is applied to the mother, Ni plating is applied and then peeling from the mother to obtain a sun. In this method, after the mother was peeled off from the master, the surface of the mother was subjected to a hydrophilic treatment, and after the sun was peeled off from the mother, the surface of the sun was subjected to a hydrophilic treatment.

Effect After peeling the mother from the master, the surface of the mother is treated to make it hydrophilic, and after peeling the sun from the mother, the surface of the sun is treated to make it hydrophilic, so that the surfaces of the mother and sun after peeling change from water repellent to hydrophilic. will be replaced with Therefore, a high-quality stamper that does not cause stains or the like and has few defects is manufactured.

Embodiment A first embodiment of the present invention will be described with reference to FIG. First, after forming a conductive film on a pre-group pattern formed on a glass substrate, this conductive film is used as a cathode and Ni
A master is obtained by peeling off the plated glass substrate. Next, this master is subjected to a release coating treatment, and then Ni-plated and peeled from this master to obtain a Zino mother. After this peeling, add the mother to isopropyl alcohol for 2
After applying a hydrophilic treatment to warm the skin for a few minutes, it is washed with water and dried. After the surface of the mother thus treated is treated with a release coating, it is plated with Ni and peeled from the mother to obtain a sun. After this peeling, a hydrophilic treatment is performed in which the sun is soaked in isopropyl alcohol for 2 minutes, then washed with water and dried.

Regarding the 10 suns reproduced by this process,
When we measured the defect rate of the data section, we found that the characteristic A
As shown, it is less than 10-" and the variation is small. In the figure, the defect rate is shown with a variation width of ±20n-1 centered on the average value for 10 samples.

Next, a second embodiment of the present invention will be described with reference to FIG. In this example, replication was performed using the same method as in the previous example, but the hydrophilic treatment by infiltrating the mother and son with isopropyl alcohol was performed for 3 minutes instead of 2 minutes. When we measured the defect rate in the data area for 10 copies made using this process, the defect rate was also less than 10", as shown by characteristic B in Figure 1, and the variation was small. It is.

By the way, as a comparative example, when replicating using the same method as in the above-mentioned example, the mother and sun were subjected to hydrophilic treatment by infiltration with isoflovir alcohol for only 1 minute, and the data were obtained for 10 copies. When the defect rate of the part was measured, it was 10'' in this case, as shown by characteristic C in FIG.

The degree of variation has widened.

Therefore, it is preferable that the hydrophilic treatment for the mother and the sun be carried out for 2 minutes or more.

Effects of the Invention In the present invention, as described above, after peeling the mother from the master, the surface of the mother is treated to make it hydrophilic, and after peeling the sun from the mother, the surface of the sun is treated to make it hydrophilic. The surface of the mother and sun can be replaced from water repellent to hydrophilic, and therefore, stains and the like caused by water repellency do not occur, making it possible to produce a high quality stamper with fewer defects.

[Brief explanation of drawings]

FIG. 1 is a characteristic diagram showing the defect rate characteristics according to the first and second embodiments of the present invention, and FIG. 2 is an explanatory diagram showing the water repellent phenomenon caused by a surfactant.

Claims (1)

[Claims] After forming a conductive film on the pre-groove pattern formed on the glass substrate, a master is obtained by peeling off the Ni plating using the conductive film as a cathode and peeling off the glass substrate, and after treating this master with a peeling film, Ni plating is applied. In the method for manufacturing a stamper for optical disk duplication, the mother is obtained by peeling from the master, the mother is treated with a release coating, and then Ni-plated and the stamper is obtained by peeling from the mother. 1. A method for manufacturing a stamper for optical disk duplication, characterized in that after peeling off, the surface of the mother is subjected to a hydrophilic treatment, and after the mother is peeled off, the surface of the sun is subjected to a hydrophilic treatment.