JPH0381083B2 - - Google Patents

Info

Publication number
JPH0381083B2
JPH0381083B2 JP18494885A JP18494885A JPH0381083B2 JP H0381083 B2 JPH0381083 B2 JP H0381083B2 JP 18494885 A JP18494885 A JP 18494885A JP 18494885 A JP18494885 A JP 18494885A JP H0381083 B2 JPH0381083 B2 JP H0381083B2
Authority
JP
Japan
Prior art keywords
light
thin film
conversion circuit
thickness
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18494885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244613A (ja
Inventor
Akira Tsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP18494885A priority Critical patent/JPS6244613A/ja
Publication of JPS6244613A publication Critical patent/JPS6244613A/ja
Publication of JPH0381083B2 publication Critical patent/JPH0381083B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP18494885A 1985-08-22 1985-08-22 膜厚測定装置 Granted JPS6244613A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18494885A JPS6244613A (ja) 1985-08-22 1985-08-22 膜厚測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18494885A JPS6244613A (ja) 1985-08-22 1985-08-22 膜厚測定装置

Publications (2)

Publication Number Publication Date
JPS6244613A JPS6244613A (ja) 1987-02-26
JPH0381083B2 true JPH0381083B2 (cs) 1991-12-27

Family

ID=16162154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18494885A Granted JPS6244613A (ja) 1985-08-22 1985-08-22 膜厚測定装置

Country Status (1)

Country Link
JP (1) JPS6244613A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2692120C1 (ru) * 2018-11-01 2019-06-21 федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" Способ определения толщины покрытия в ходе процесса плазменно-электролитического оксидирования

Also Published As

Publication number Publication date
JPS6244613A (ja) 1987-02-26

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