JPH0379647B2 - - Google Patents

Info

Publication number
JPH0379647B2
JPH0379647B2 JP58057054A JP5705483A JPH0379647B2 JP H0379647 B2 JPH0379647 B2 JP H0379647B2 JP 58057054 A JP58057054 A JP 58057054A JP 5705483 A JP5705483 A JP 5705483A JP H0379647 B2 JPH0379647 B2 JP H0379647B2
Authority
JP
Japan
Prior art keywords
electrode
electrodes
transmitting
phase
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58057054A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59183329A (ja
Inventor
Koji Sasaki
Yoshihiro Arai
Yasuyuki Yamaguchi
Toshuki Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP58057054A priority Critical patent/JPS59183329A/ja
Priority to US06/595,248 priority patent/US4578868A/en
Publication of JPS59183329A publication Critical patent/JPS59183329A/ja
Publication of JPH0379647B2 publication Critical patent/JPH0379647B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP58057054A 1983-04-01 1983-04-01 デジタル表示測定装置 Granted JPS59183329A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58057054A JPS59183329A (ja) 1983-04-01 1983-04-01 デジタル表示測定装置
US06/595,248 US4578868A (en) 1983-04-01 1984-03-30 Digital display measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58057054A JPS59183329A (ja) 1983-04-01 1983-04-01 デジタル表示測定装置

Publications (2)

Publication Number Publication Date
JPS59183329A JPS59183329A (ja) 1984-10-18
JPH0379647B2 true JPH0379647B2 (lt) 1991-12-19

Family

ID=13044726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58057054A Granted JPS59183329A (ja) 1983-04-01 1983-04-01 デジタル表示測定装置

Country Status (1)

Country Link
JP (1) JPS59183329A (lt)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61105421A (ja) * 1984-10-29 1986-05-23 Mitsutoyo Mfg Co Ltd 静電容量型エンコ−ダ
JP4088073B2 (ja) * 2002-01-11 2008-05-21 株式会社ミツトヨ 絶対位置測定装置
JP5022724B2 (ja) * 2006-03-07 2012-09-12 株式会社ミツトヨ 絶対位置測定装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494354A (en) * 1977-12-09 1979-07-26 Stiftelsen Inst Mikrovags Device for measuring relative position of moving part

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494354A (en) * 1977-12-09 1979-07-26 Stiftelsen Inst Mikrovags Device for measuring relative position of moving part

Also Published As

Publication number Publication date
JPS59183329A (ja) 1984-10-18

Similar Documents

Publication Publication Date Title
US4578868A (en) Digital display measuring apparatus
US5691646A (en) Capacitance-type displacement measuring device with electrodes having spiral patterns
US4788546A (en) Electrostatic capacity type encoder
JPS6411883B2 (lt)
JPH0467882B2 (lt)
JPH0374767B2 (lt)
JPH05215506A (ja) 容量性位置センサ
EP0111642B1 (en) Method and apparatus for measuring a displacement of one member relative to another
US6772087B2 (en) Absolute position measuring device
US4486891A (en) Contact point type measuring device
JPH0379647B2 (lt)
JPS59187203A (ja) デジタル表示マイクロメ−タ
JPH0467881B2 (lt)
JP6507347B2 (ja) 静電容量式角度検出装置
JP2837636B2 (ja) 静電容量式変位測定装置
JP4054693B2 (ja) 静電容量式変位測定器
JPS5813681Y2 (ja) スピンドル回転角検出器を有するマイクロメ−タ
JPS61271411A (ja) 静電容量型エンコ−ダ
JPS61269016A (ja) 静電容量型エンコ−ダ
JPH0354285B2 (lt)
JPS6233526B2 (lt)
JPH0354284B2 (lt)
JPS61235702A (ja) 静電容量型ノギス
JPS62159002A (ja) デジタル表示型測定器
JPS61235721A (ja) 静電容量型エンコ−ダ