JPH0378996U - - Google Patents
Info
- Publication number
- JPH0378996U JPH0378996U JP14025689U JP14025689U JPH0378996U JP H0378996 U JPH0378996 U JP H0378996U JP 14025689 U JP14025689 U JP 14025689U JP 14025689 U JP14025689 U JP 14025689U JP H0378996 U JPH0378996 U JP H0378996U
- Authority
- JP
- Japan
- Prior art keywords
- gas bearing
- radial gas
- bearing
- high frequency
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002131 composite material Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 230000003068 static effect Effects 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- 239000007769 metal material Substances 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14025689U JPH0378996U (it) | 1989-12-05 | 1989-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14025689U JPH0378996U (it) | 1989-12-05 | 1989-12-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378996U true JPH0378996U (it) | 1991-08-12 |
Family
ID=31687240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14025689U Pending JPH0378996U (it) | 1989-12-05 | 1989-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378996U (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005083506A (ja) * | 2003-09-09 | 2005-03-31 | Canon Inc | 空気軸受装置 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61185696A (ja) * | 1985-02-13 | 1986-08-19 | Hitachi Ltd | 分子ポンプ |
| JPS6412123A (en) * | 1987-07-03 | 1989-01-17 | Ebara Corp | Rotary machine |
| JPS6410473U (it) * | 1987-07-10 | 1989-01-19 | ||
| JPH01167495A (ja) * | 1987-12-23 | 1989-07-03 | Hitachi Ltd | 真空ポンプ |
| JPH0219694A (ja) * | 1988-07-08 | 1990-01-23 | Ebara Res Co Ltd | オイルフリー型真空ポンプ |
-
1989
- 1989-12-05 JP JP14025689U patent/JPH0378996U/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61185696A (ja) * | 1985-02-13 | 1986-08-19 | Hitachi Ltd | 分子ポンプ |
| JPS6412123A (en) * | 1987-07-03 | 1989-01-17 | Ebara Corp | Rotary machine |
| JPS6410473U (it) * | 1987-07-10 | 1989-01-19 | ||
| JPH01167495A (ja) * | 1987-12-23 | 1989-07-03 | Hitachi Ltd | 真空ポンプ |
| JPH0219694A (ja) * | 1988-07-08 | 1990-01-23 | Ebara Res Co Ltd | オイルフリー型真空ポンプ |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005083506A (ja) * | 2003-09-09 | 2005-03-31 | Canon Inc | 空気軸受装置 |
| JP4508585B2 (ja) * | 2003-09-09 | 2010-07-21 | キヤノン株式会社 | 空気軸受装置 |