JPH0378230B2 - - Google Patents
Info
- Publication number
- JPH0378230B2 JPH0378230B2 JP62107970A JP10797087A JPH0378230B2 JP H0378230 B2 JPH0378230 B2 JP H0378230B2 JP 62107970 A JP62107970 A JP 62107970A JP 10797087 A JP10797087 A JP 10797087A JP H0378230 B2 JPH0378230 B2 JP H0378230B2
- Authority
- JP
- Japan
- Prior art keywords
- box
- lid
- end effector
- robot
- horizontally
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012636 effector Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000032258 transport Effects 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62107970A JPS6471682A (en) | 1987-05-02 | 1987-05-02 | Robot end effector for opening and closing box cover |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62107970A JPS6471682A (en) | 1987-05-02 | 1987-05-02 | Robot end effector for opening and closing box cover |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6471682A JPS6471682A (en) | 1989-03-16 |
| JPH0378230B2 true JPH0378230B2 (cs) | 1991-12-13 |
Family
ID=14472684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62107970A Granted JPS6471682A (en) | 1987-05-02 | 1987-05-02 | Robot end effector for opening and closing box cover |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6471682A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011088226A (ja) * | 2009-10-20 | 2011-05-06 | Yaskawa Electric Corp | ロボット装置及びロボットシステム並びに対象物のハンドリング方法 |
-
1987
- 1987-05-02 JP JP62107970A patent/JPS6471682A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6471682A (en) | 1989-03-16 |
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