JPH0378058U - - Google Patents

Info

Publication number
JPH0378058U
JPH0378058U JP14010089U JP14010089U JPH0378058U JP H0378058 U JPH0378058 U JP H0378058U JP 14010089 U JP14010089 U JP 14010089U JP 14010089 U JP14010089 U JP 14010089U JP H0378058 U JPH0378058 U JP H0378058U
Authority
JP
Japan
Prior art keywords
clamper
shafts
board
drive shafts
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14010089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0718756Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14010089U priority Critical patent/JPH0718756Y2/ja
Publication of JPH0378058U publication Critical patent/JPH0378058U/ja
Application granted granted Critical
Publication of JPH0718756Y2 publication Critical patent/JPH0718756Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14010089U 1989-12-01 1989-12-01 基板保持装置 Expired - Lifetime JPH0718756Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14010089U JPH0718756Y2 (ja) 1989-12-01 1989-12-01 基板保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14010089U JPH0718756Y2 (ja) 1989-12-01 1989-12-01 基板保持装置

Publications (2)

Publication Number Publication Date
JPH0378058U true JPH0378058U (enrdf_load_stackoverflow) 1991-08-07
JPH0718756Y2 JPH0718756Y2 (ja) 1995-05-01

Family

ID=31687098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14010089U Expired - Lifetime JPH0718756Y2 (ja) 1989-12-01 1989-12-01 基板保持装置

Country Status (1)

Country Link
JP (1) JPH0718756Y2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003123682A (ja) * 2001-10-18 2003-04-25 Hitachi High-Technologies Corp 荷電粒子線装置
JP2013093279A (ja) * 2011-10-27 2013-05-16 Hitachi High-Technologies Corp 有機ｅｌデバイス製造装置
JP2019165140A (ja) * 2018-03-20 2019-09-26 日新電機株式会社 クランプ機構及び当該クランプ機構を備える基板保持装置
CN112410745A (zh) * 2020-10-26 2021-02-26 Tcl华星光电技术有限公司 夹持装置及夹持装置的控制方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003123682A (ja) * 2001-10-18 2003-04-25 Hitachi High-Technologies Corp 荷電粒子線装置
JP2013093279A (ja) * 2011-10-27 2013-05-16 Hitachi High-Technologies Corp 有機ｅｌデバイス製造装置
JP2019165140A (ja) * 2018-03-20 2019-09-26 日新電機株式会社 クランプ機構及び当該クランプ機構を備える基板保持装置
WO2019181775A1 (ja) * 2018-03-20 2019-09-26 日新電機株式会社 クランプ機構及び当該クランプ機構を備える基板保持装置
CN112410745A (zh) * 2020-10-26 2021-02-26 Tcl华星光电技术有限公司 夹持装置及夹持装置的控制方法

Also Published As

Publication number Publication date
JPH0718756Y2 (ja) 1995-05-01

Similar Documents

Publication Publication Date Title
USD265919S (en) Square puzzle
JPS6097123U (ja) 歯科治療台
JPH0372493U (enrdf_load_stackoverflow)
JPH0378058U (enrdf_load_stackoverflow)
JPS63126847U (enrdf_load_stackoverflow)
JPS6396586U (enrdf_load_stackoverflow)
JPS63136841U (enrdf_load_stackoverflow)
JPH0476341U (enrdf_load_stackoverflow)
JPH0317633U (enrdf_load_stackoverflow)
JPS6097252U (ja) 片面精密研磨装置構造
JPH0365625U (enrdf_load_stackoverflow)
JPS6040854U (ja) 歯車のバックラッシュ除去機構
JPH01154549U (enrdf_load_stackoverflow)
JPH01169798U (enrdf_load_stackoverflow)
JPH045827U (enrdf_load_stackoverflow)
JPH0347692U (enrdf_load_stackoverflow)
JPH0241279U (enrdf_load_stackoverflow)
JPS62113966U (enrdf_load_stackoverflow)
JPH0336727U (enrdf_load_stackoverflow)
JPH0428925U (enrdf_load_stackoverflow)
JPH035420U (enrdf_load_stackoverflow)
JPS62178571U (enrdf_load_stackoverflow)
JPH02110445U (enrdf_load_stackoverflow)
JPS5851661U (ja) 小型電動機
JPH02136399U (enrdf_load_stackoverflow)

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term