JPH0378057U - - Google Patents
Info
- Publication number
- JPH0378057U JPH0378057U JP13817889U JP13817889U JPH0378057U JP H0378057 U JPH0378057 U JP H0378057U JP 13817889 U JP13817889 U JP 13817889U JP 13817889 U JP13817889 U JP 13817889U JP H0378057 U JPH0378057 U JP H0378057U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrates
- substrate holder
- holds
- potential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13817889U JPH0378057U ( ) | 1989-11-28 | 1989-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13817889U JPH0378057U ( ) | 1989-11-28 | 1989-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378057U true JPH0378057U ( ) | 1991-08-07 |
Family
ID=31685298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13817889U Pending JPH0378057U ( ) | 1989-11-28 | 1989-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378057U ( ) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008057227A (ja) * | 2006-08-31 | 2008-03-13 | Hitachi Housetec Co Ltd | 浴室ユニット |
-
1989
- 1989-11-28 JP JP13817889U patent/JPH0378057U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008057227A (ja) * | 2006-08-31 | 2008-03-13 | Hitachi Housetec Co Ltd | 浴室ユニット |