JPH0429656U - - Google Patents
Info
- Publication number
- JPH0429656U JPH0429656U JP6813390U JP6813390U JPH0429656U JP H0429656 U JPH0429656 U JP H0429656U JP 6813390 U JP6813390 U JP 6813390U JP 6813390 U JP6813390 U JP 6813390U JP H0429656 U JPH0429656 U JP H0429656U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- plate
- target
- bucking
- introduction part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6813390U JPH0429656U ( ) | 1990-06-27 | 1990-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6813390U JPH0429656U ( ) | 1990-06-27 | 1990-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0429656U true JPH0429656U ( ) | 1992-03-10 |
Family
ID=31602309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6813390U Pending JPH0429656U ( ) | 1990-06-27 | 1990-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429656U ( ) |
-
1990
- 1990-06-27 JP JP6813390U patent/JPH0429656U/ja active Pending