JPH0378054U - - Google Patents
Info
- Publication number
- JPH0378054U JPH0378054U JP13936689U JP13936689U JPH0378054U JP H0378054 U JPH0378054 U JP H0378054U JP 13936689 U JP13936689 U JP 13936689U JP 13936689 U JP13936689 U JP 13936689U JP H0378054 U JPH0378054 U JP H0378054U
- Authority
- JP
- Japan
- Prior art keywords
- film formation
- substrates
- held
- target
- interposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13936689U JPH0378054U (me) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13936689U JPH0378054U (me) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378054U true JPH0378054U (me) | 1991-08-07 |
Family
ID=31686417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13936689U Pending JPH0378054U (me) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378054U (me) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01268870A (ja) * | 1988-04-18 | 1989-10-26 | Anelva Corp | 縦トレイ搬送式スパッタ装置 |
-
1989
- 1989-11-30 JP JP13936689U patent/JPH0378054U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01268870A (ja) * | 1988-04-18 | 1989-10-26 | Anelva Corp | 縦トレイ搬送式スパッタ装置 |