JPH0377901U - - Google Patents
Info
- Publication number
- JPH0377901U JPH0377901U JP13833789U JP13833789U JPH0377901U JP H0377901 U JPH0377901 U JP H0377901U JP 13833789 U JP13833789 U JP 13833789U JP 13833789 U JP13833789 U JP 13833789U JP H0377901 U JPH0377901 U JP H0377901U
- Authority
- JP
- Japan
- Prior art keywords
- wave generating
- spherical wave
- pinhole
- thin film
- flat plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989138337U JP2519543Y2 (ja) | 1989-11-29 | 1989-11-29 | 光球面波発生装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989138337U JP2519543Y2 (ja) | 1989-11-29 | 1989-11-29 | 光球面波発生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0377901U true JPH0377901U (nl) | 1991-08-06 |
JP2519543Y2 JP2519543Y2 (ja) | 1996-12-04 |
Family
ID=31685444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989138337U Expired - Fee Related JP2519543Y2 (ja) | 1989-11-29 | 1989-11-29 | 光球面波発生装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2519543Y2 (nl) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005195739A (ja) * | 2004-01-05 | 2005-07-21 | Nikon Corp | 共焦点光学系及び高さ測定装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60108246A (ja) * | 1983-11-18 | 1985-06-13 | Washino Koki Kk | センタリングマシン |
JPH02228505A (ja) * | 1989-03-02 | 1990-09-11 | Nikon Corp | 干渉計 |
-
1989
- 1989-11-29 JP JP1989138337U patent/JP2519543Y2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60108246A (ja) * | 1983-11-18 | 1985-06-13 | Washino Koki Kk | センタリングマシン |
JPH02228505A (ja) * | 1989-03-02 | 1990-09-11 | Nikon Corp | 干渉計 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005195739A (ja) * | 2004-01-05 | 2005-07-21 | Nikon Corp | 共焦点光学系及び高さ測定装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2519543Y2 (ja) | 1996-12-04 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |