JPH0377467U - - Google Patents
Info
- Publication number
- JPH0377467U JPH0377467U JP13794389U JP13794389U JPH0377467U JP H0377467 U JPH0377467 U JP H0377467U JP 13794389 U JP13794389 U JP 13794389U JP 13794389 U JP13794389 U JP 13794389U JP H0377467 U JPH0377467 U JP H0377467U
- Authority
- JP
- Japan
- Prior art keywords
- gas circulation
- voltage
- circulation path
- collection electrode
- laser device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010419 fine particle Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794389U JPH0377467U (ro) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794389U JPH0377467U (ro) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0377467U true JPH0377467U (ro) | 1991-08-05 |
Family
ID=31685076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13794389U Pending JPH0377467U (ro) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0377467U (ro) |
-
1989
- 1989-11-30 JP JP13794389U patent/JPH0377467U/ja active Pending
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