JPH0377433U - - Google Patents
Info
- Publication number
- JPH0377433U JPH0377433U JP1989139070U JP13907089U JPH0377433U JP H0377433 U JPH0377433 U JP H0377433U JP 1989139070 U JP1989139070 U JP 1989139070U JP 13907089 U JP13907089 U JP 13907089U JP H0377433 U JPH0377433 U JP H0377433U
- Authority
- JP
- Japan
- Prior art keywords
- developing device
- substrate
- solution
- spin
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989139070U JPH0377433U (enExample) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989139070U JPH0377433U (enExample) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0377433U true JPH0377433U (enExample) | 1991-08-05 |
Family
ID=31686138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989139070U Pending JPH0377433U (enExample) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0377433U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57192955A (en) * | 1981-05-25 | 1982-11-27 | Toppan Printing Co Ltd | Developing method |
-
1989
- 1989-11-30 JP JP1989139070U patent/JPH0377433U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57192955A (en) * | 1981-05-25 | 1982-11-27 | Toppan Printing Co Ltd | Developing method |