JPH037588Y2 - - Google Patents

Info

Publication number
JPH037588Y2
JPH037588Y2 JP1985191842U JP19184285U JPH037588Y2 JP H037588 Y2 JPH037588 Y2 JP H037588Y2 JP 1985191842 U JP1985191842 U JP 1985191842U JP 19184285 U JP19184285 U JP 19184285U JP H037588 Y2 JPH037588 Y2 JP H037588Y2
Authority
JP
Japan
Prior art keywords
compressor
pressure
air
low
compressed air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985191842U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6298783U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985191842U priority Critical patent/JPH037588Y2/ja
Publication of JPS6298783U publication Critical patent/JPS6298783U/ja
Application granted granted Critical
Publication of JPH037588Y2 publication Critical patent/JPH037588Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1985191842U 1985-12-13 1985-12-13 Expired JPH037588Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985191842U JPH037588Y2 (fr) 1985-12-13 1985-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985191842U JPH037588Y2 (fr) 1985-12-13 1985-12-13

Publications (2)

Publication Number Publication Date
JPS6298783U JPS6298783U (fr) 1987-06-23
JPH037588Y2 true JPH037588Y2 (fr) 1991-02-25

Family

ID=31146358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985191842U Expired JPH037588Y2 (fr) 1985-12-13 1985-12-13

Country Status (1)

Country Link
JP (1) JPH037588Y2 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8383202B2 (en) 2008-06-13 2013-02-26 Kateeva, Inc. Method and apparatus for load-locked printing
KR102341544B1 (ko) * 2011-12-22 2021-12-21 카티바, 인크. 가스 엔클로저 시스템
JP6200766B2 (ja) * 2013-10-25 2017-09-20 株式会社日立産機システム 昇圧装置
CN107256840B (zh) 2014-01-21 2019-05-31 科迪华公司 用于电子装置封装的设备和技术

Also Published As

Publication number Publication date
JPS6298783U (fr) 1987-06-23

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