JPH0375529U - - Google Patents
Info
- Publication number
- JPH0375529U JPH0375529U JP13535389U JP13535389U JPH0375529U JP H0375529 U JPH0375529 U JP H0375529U JP 13535389 U JP13535389 U JP 13535389U JP 13535389 U JP13535389 U JP 13535389U JP H0375529 U JPH0375529 U JP H0375529U
- Authority
- JP
- Japan
- Prior art keywords
- wavelength
- exposure
- exposure apparatus
- laminated lens
- lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13535389U JPH0375529U (ko) | 1989-11-24 | 1989-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13535389U JPH0375529U (ko) | 1989-11-24 | 1989-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0375529U true JPH0375529U (ko) | 1991-07-29 |
Family
ID=31682624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13535389U Pending JPH0375529U (ko) | 1989-11-24 | 1989-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0375529U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015018972A (ja) * | 2013-07-11 | 2015-01-29 | キヤノン株式会社 | インプリント装置及び物品の製造方法 |
| JP2018205682A (ja) * | 2017-06-06 | 2018-12-27 | 株式会社オーク製作所 | 露光装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6139517A (ja) * | 1984-07-30 | 1986-02-25 | Hitachi Ltd | 照明装置 |
-
1989
- 1989-11-24 JP JP13535389U patent/JPH0375529U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6139517A (ja) * | 1984-07-30 | 1986-02-25 | Hitachi Ltd | 照明装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015018972A (ja) * | 2013-07-11 | 2015-01-29 | キヤノン株式会社 | インプリント装置及び物品の製造方法 |
| US9625837B2 (en) | 2013-07-11 | 2017-04-18 | Canon Kabushiki Kaisha | Imprint apparatus and method of manufacturing article |
| JP2018205682A (ja) * | 2017-06-06 | 2018-12-27 | 株式会社オーク製作所 | 露光装置 |