JPH037487U - - Google Patents
Info
- Publication number
- JPH037487U JPH037487U JP6868489U JP6868489U JPH037487U JP H037487 U JPH037487 U JP H037487U JP 6868489 U JP6868489 U JP 6868489U JP 6868489 U JP6868489 U JP 6868489U JP H037487 U JPH037487 U JP H037487U
- Authority
- JP
- Japan
- Prior art keywords
- closing valve
- suction
- electromagnetic opening
- vacuum
- vacuum switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は実施例に係る真空吸着装置の構成図、
第２図は真空吸着装置の吸入部の正規密着状態の
説明図、第３図は同吸入部が搬送物表面から部分
的に外れた状態の説明図である。 １０……吸着パツド、１２……ダンボール、２
０……可変絞り部、２２……電磁開閉バルブ、２
４……真空スイツチ。
第２図は真空吸着装置の吸入部の正規密着状態の
説明図、第３図は同吸入部が搬送物表面から部分
的に外れた状態の説明図である。 １０……吸着パツド、１２……ダンボール、２
０……可変絞り部、２２……電磁開閉バルブ、２
４……真空スイツチ。
Claims (1)
- 共通負圧源に接続される複数の吸入部を有し、
当該吸入部に対応した個々の分岐部の少なくとも
一以上に真空スイツチと電磁開閉バルブの組を配
置し、当該真空スイツチに応動して前記電磁開閉
バルブを開閉可能としたことを特徴とする真空吸
着装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6868489U JPH037487U (ja) | 1989-06-13 | 1989-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6868489U JPH037487U (ja) | 1989-06-13 | 1989-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH037487U true JPH037487U (ja) | 1991-01-24 |
Family
ID=31603330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6868489U Pending JPH037487U (ja) | 1989-06-13 | 1989-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037487U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003037576A1 (fr) * | 2000-06-29 | 2003-05-08 | Shibaura Mechatronics Corporation | Appareil et procede de transfert de substrat |
| CN1298515C (zh) * | 2001-11-01 | 2007-02-07 | 芝浦机械电子装置股份有限公司 | 基板输送装置和基板输送方法 |
-
1989
- 1989-06-13 JP JP6868489U patent/JPH037487U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003037576A1 (fr) * | 2000-06-29 | 2003-05-08 | Shibaura Mechatronics Corporation | Appareil et procede de transfert de substrat |
| CN1298515C (zh) * | 2001-11-01 | 2007-02-07 | 芝浦机械电子装置股份有限公司 | 基板输送装置和基板输送方法 |