JPH0374659U - - Google Patents
Info
- Publication number
- JPH0374659U JPH0374659U JP13556489U JP13556489U JPH0374659U JP H0374659 U JPH0374659 U JP H0374659U JP 13556489 U JP13556489 U JP 13556489U JP 13556489 U JP13556489 U JP 13556489U JP H0374659 U JPH0374659 U JP H0374659U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum pump
- vacuum evaporation
- heat load
- buttfuls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13556489U JPH0374659U (no) | 1989-11-22 | 1989-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13556489U JPH0374659U (no) | 1989-11-22 | 1989-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0374659U true JPH0374659U (no) | 1991-07-26 |
Family
ID=31682826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13556489U Pending JPH0374659U (no) | 1989-11-22 | 1989-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0374659U (no) |
-
1989
- 1989-11-22 JP JP13556489U patent/JPH0374659U/ja active Pending