JPH01119065U - - Google Patents
Info
- Publication number
- JPH01119065U JPH01119065U JP1398488U JP1398488U JPH01119065U JP H01119065 U JPH01119065 U JP H01119065U JP 1398488 U JP1398488 U JP 1398488U JP 1398488 U JP1398488 U JP 1398488U JP H01119065 U JPH01119065 U JP H01119065U
- Authority
- JP
- Japan
- Prior art keywords
- liquid nitrogen
- shroud
- molecular beam
- extraction port
- nitrogen shroud
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1398488U JPH01119065U (no) | 1988-02-03 | 1988-02-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1398488U JPH01119065U (no) | 1988-02-03 | 1988-02-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01119065U true JPH01119065U (no) | 1989-08-11 |
Family
ID=31224772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1398488U Pending JPH01119065U (no) | 1988-02-03 | 1988-02-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01119065U (no) |
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1988
- 1988-02-03 JP JP1398488U patent/JPH01119065U/ja active Pending