JPH0374373U - - Google Patents
Info
- Publication number
- JPH0374373U JPH0374373U JP7316490U JP7316490U JPH0374373U JP H0374373 U JPH0374373 U JP H0374373U JP 7316490 U JP7316490 U JP 7316490U JP 7316490 U JP7316490 U JP 7316490U JP H0374373 U JPH0374373 U JP H0374373U
- Authority
- JP
- Japan
- Prior art keywords
- frequency power
- aging device
- temperature aging
- temperature
- power according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000032683 aging Effects 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 2
- 230000005679 Peltier effect Effects 0.000 claims 1
- 238000007664 blowing Methods 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 239000009719 polyimide resin Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Description
第１図ａ，ｂは本考案の実施例１の一部断面に
した正面図および平面図、第２図ａ，ｂは実施例
２の一部断面にした正面図および平面図、第３図
ａ，ｂは実施例３の一部断面にした正面図および
平面図、第４図ａ，ｂは従来の高温エージング装
置の一部断面にした正面図および平面図、第５図
は製品を測定治具に取り付けた状態を示す正面図
である。
１……測定治具、２……ヒータブロツク、３…
…入力側チユーナ、４……出力側チユーナ、５…
…断熱材、６……冷却フアン、７……測定治具本
体、８……製品押さえ、９……製品、１０……コ
ネクタ、１１……エアーブロー管、１２……電子
冷却器。
Figures 1a and b are a partially sectional front view and plan view of Embodiment 1 of the present invention, Figures 2a and b are a partially sectional front view and plan view of Embodiment 2, and Figure 3 Figures a and b are a partially sectional front view and plan view of Example 3, Figures 4 a and b are a partially sectional front view and plan view of a conventional high temperature aging device, and Figure 5 is a measurement of the product. It is a front view showing the state attached to the jig. 1...Measuring jig, 2...Heater block, 3...
...Input side tuner, 4...Output side tuner, 5...
...Insulating material, 6...Cooling fan, 7...Measuring jig body, 8...Product holder, 9...Product, 10...Connector, 11...Air blow tube, 12...Electronic cooler.
Claims (1)
ヒータブロツク及び測定治具を断熱材で密閉した
高温部と、周辺の高周波部品の温度上昇を抑える
ための冷却部とを有することを特徴とする高周波
電力の高温エージング装置。 ２ 冷却部に冷却フアンを用いた請求項１記載の
高周波電力の高温エージング装置。 ３ 冷却部に高圧エアーを吹き出すエアーブロー
管を用いた請求項１記載の高周波電力の高温エー
ジング装置。 ４ 冷却部にペルチエ効果を利用した電子冷却器
を用いた請求項１記載の高周波電力の高温エージ
ング装置。 ５ 高温部における測定治具の製品押さえ部材に
ポリイミド樹脂を用いた請求項１記載の高周波電
力の高温エージング装置。[Scope of claims for utility model registration] 1. In a high-temperature aging device using high-frequency power,
A high-temperature aging device using high-frequency power, characterized by having a high-temperature section in which a heater block and a measuring jig are sealed with a heat insulating material, and a cooling section for suppressing the temperature rise of surrounding high-frequency components. 2. The high-temperature aging device using high frequency power according to claim 1, wherein a cooling fan is used in the cooling section. 3. The high-temperature aging device using high-frequency power according to claim 1, which uses an air blow tube for blowing high-pressure air into the cooling section. 4. The high-temperature aging device using high frequency power according to claim 1, wherein the cooling section uses an electronic cooler that utilizes the Peltier effect. 5. The high-temperature aging device using high-frequency power according to claim 1, wherein polyimide resin is used for the product holding member of the measuring jig in the high-temperature section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7316490U JPH0374373U (en) | 1989-07-28 | 1990-07-10 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8932489 | 1989-07-28 | ||
| JP7316490U JPH0374373U (en) | 1989-07-28 | 1990-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0374373U true JPH0374373U (en) | 1991-07-25 |
Family
ID=31890169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7316490U Pending JPH0374373U (en) | 1989-07-28 | 1990-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0374373U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62267676A (en) * | 1986-05-16 | 1987-11-20 | Fujitsu Ltd | Semiconductor element evaluating device |
-
1990
- 1990-07-10 JP JP7316490U patent/JPH0374373U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62267676A (en) * | 1986-05-16 | 1987-11-20 | Fujitsu Ltd | Semiconductor element evaluating device |
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