JPH037429B2 - - Google Patents

Info

Publication number
JPH037429B2
JPH037429B2 JP19668583A JP19668583A JPH037429B2 JP H037429 B2 JPH037429 B2 JP H037429B2 JP 19668583 A JP19668583 A JP 19668583A JP 19668583 A JP19668583 A JP 19668583A JP H037429 B2 JPH037429 B2 JP H037429B2
Authority
JP
Japan
Prior art keywords
dust
cloth
electrodes
double
double helical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19668583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6087866A (ja
Inventor
Senichi Masuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP58196685A priority Critical patent/JPS6087866A/ja
Publication of JPS6087866A publication Critical patent/JPS6087866A/ja
Publication of JPH037429B2 publication Critical patent/JPH037429B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrostatic Separation (AREA)
JP58196685A 1983-10-20 1983-10-20 静電バグフイルタ Granted JPS6087866A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58196685A JPS6087866A (ja) 1983-10-20 1983-10-20 静電バグフイルタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58196685A JPS6087866A (ja) 1983-10-20 1983-10-20 静電バグフイルタ

Publications (2)

Publication Number Publication Date
JPS6087866A JPS6087866A (ja) 1985-05-17
JPH037429B2 true JPH037429B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-02-01

Family

ID=16361887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58196685A Granted JPS6087866A (ja) 1983-10-20 1983-10-20 静電バグフイルタ

Country Status (1)

Country Link
JP (1) JPS6087866A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6613240B2 (en) 1999-12-06 2003-09-02 Epion Corporation Method and apparatus for smoothing thin conductive films by gas cluster ion beam

Also Published As

Publication number Publication date
JPS6087866A (ja) 1985-05-17

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