JPH0373453U - - Google Patents
Info
- Publication number
- JPH0373453U JPH0373453U JP13558589U JP13558589U JPH0373453U JP H0373453 U JPH0373453 U JP H0373453U JP 13558589 U JP13558589 U JP 13558589U JP 13558589 U JP13558589 U JP 13558589U JP H0373453 U JPH0373453 U JP H0373453U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- shaped insulator
- grooves
- electrostatic adsorption
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012212 insulator Substances 0.000 claims description 5
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims 3
- 239000007789 gas Substances 0.000 claims 2
- 238000001312 dry etching Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Weting (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989135585U JP2537739Y2 (ja) | 1989-11-22 | 1989-11-22 | 静電吸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989135585U JP2537739Y2 (ja) | 1989-11-22 | 1989-11-22 | 静電吸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0373453U true JPH0373453U (US06826419-20041130-M00005.png) | 1991-07-24 |
| JP2537739Y2 JP2537739Y2 (ja) | 1997-06-04 |
Family
ID=31682846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989135585U Expired - Lifetime JP2537739Y2 (ja) | 1989-11-22 | 1989-11-22 | 静電吸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2537739Y2 (US06826419-20041130-M00005.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006168772A (ja) * | 2004-12-15 | 2006-06-29 | Dainippon Printing Co Ltd | マチ付き封筒 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55115047U (US06826419-20041130-M00005.png) * | 1979-02-06 | 1980-08-13 | ||
| JPS5922340A (ja) * | 1982-07-29 | 1984-02-04 | Toshiba Corp | 静電チヤツク装置 |
| JPS60115226A (ja) * | 1983-11-28 | 1985-06-21 | Hitachi Ltd | 試料の温度制御方法及び装置 |
| JPS6395644A (ja) * | 1986-10-13 | 1988-04-26 | Nippon Telegr & Teleph Corp <Ntt> | 静電チヤツク |
| JPH01200625A (ja) * | 1988-02-05 | 1989-08-11 | Toshiba Corp | 半導体ウェーハ処理装置 |
| JPH01135585U (US06826419-20041130-M00005.png) * | 1988-03-09 | 1989-09-18 | ||
| JPH01251735A (ja) * | 1988-03-31 | 1989-10-06 | Toshiba Corp | 静電チャック装置 |
| JPH0622213A (ja) * | 1992-07-03 | 1994-01-28 | Nec Corp | 動画像フィルタ |
-
1989
- 1989-11-22 JP JP1989135585U patent/JP2537739Y2/ja not_active Expired - Lifetime
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55115047U (US06826419-20041130-M00005.png) * | 1979-02-06 | 1980-08-13 | ||
| JPS5922340A (ja) * | 1982-07-29 | 1984-02-04 | Toshiba Corp | 静電チヤツク装置 |
| JPS60115226A (ja) * | 1983-11-28 | 1985-06-21 | Hitachi Ltd | 試料の温度制御方法及び装置 |
| JPS6395644A (ja) * | 1986-10-13 | 1988-04-26 | Nippon Telegr & Teleph Corp <Ntt> | 静電チヤツク |
| JPH01200625A (ja) * | 1988-02-05 | 1989-08-11 | Toshiba Corp | 半導体ウェーハ処理装置 |
| JPH01135585U (US06826419-20041130-M00005.png) * | 1988-03-09 | 1989-09-18 | ||
| JPH01251735A (ja) * | 1988-03-31 | 1989-10-06 | Toshiba Corp | 静電チャック装置 |
| JPH0622213A (ja) * | 1992-07-03 | 1994-01-28 | Nec Corp | 動画像フィルタ |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006168772A (ja) * | 2004-12-15 | 2006-06-29 | Dainippon Printing Co Ltd | マチ付き封筒 |
| JP4504174B2 (ja) * | 2004-12-15 | 2010-07-14 | 大日本印刷株式会社 | マチ付き封筒 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2537739Y2 (ja) | 1997-06-04 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |