JPH0372843B2 - - Google Patents
Info
- Publication number
- JPH0372843B2 JPH0372843B2 JP7581985A JP7581985A JPH0372843B2 JP H0372843 B2 JPH0372843 B2 JP H0372843B2 JP 7581985 A JP7581985 A JP 7581985A JP 7581985 A JP7581985 A JP 7581985A JP H0372843 B2 JPH0372843 B2 JP H0372843B2
- Authority
- JP
- Japan
- Prior art keywords
- compressed air
- piston
- receiving surface
- pressure receiving
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001105 regulatory effect Effects 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Fluid-Pressure Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7581985A JPS61236907A (ja) | 1985-04-10 | 1985-04-10 | エアパルス発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7581985A JPS61236907A (ja) | 1985-04-10 | 1985-04-10 | エアパルス発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61236907A JPS61236907A (ja) | 1986-10-22 |
| JPH0372843B2 true JPH0372843B2 (enrdf_load_stackoverflow) | 1991-11-20 |
Family
ID=13587170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7581985A Granted JPS61236907A (ja) | 1985-04-10 | 1985-04-10 | エアパルス発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61236907A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2724112B2 (ja) * | 1994-04-04 | 1998-03-09 | 株式会社しなのエレクトロニクス | ステッピングエアモータ及びそれを用いた半導体検査装置 |
| JP6557246B2 (ja) * | 2014-10-22 | 2019-08-07 | クロダニューマティクス株式会社 | 間歇エア発生装置 |
-
1985
- 1985-04-10 JP JP7581985A patent/JPS61236907A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61236907A (ja) | 1986-10-22 |
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