JPS61236907A - エアパルス発生装置 - Google Patents

エアパルス発生装置

Info

Publication number
JPS61236907A
JPS61236907A JP7581985A JP7581985A JPS61236907A JP S61236907 A JPS61236907 A JP S61236907A JP 7581985 A JP7581985 A JP 7581985A JP 7581985 A JP7581985 A JP 7581985A JP S61236907 A JPS61236907 A JP S61236907A
Authority
JP
Japan
Prior art keywords
air
compressed air
piston
receiving surface
diameter pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7581985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0372843B2 (enrdf_load_stackoverflow
Inventor
Yoji Koide
小出　洋治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHIYUREEDAA BEROOZU KK
Original Assignee
SHIYUREEDAA BEROOZU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHIYUREEDAA BEROOZU KK filed Critical SHIYUREEDAA BEROOZU KK
Priority to JP7581985A priority Critical patent/JPS61236907A/ja
Publication of JPS61236907A publication Critical patent/JPS61236907A/ja
Publication of JPH0372843B2 publication Critical patent/JPH0372843B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fluid-Pressure Circuits (AREA)
JP7581985A 1985-04-10 1985-04-10 エアパルス発生装置 Granted JPS61236907A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7581985A JPS61236907A (ja) 1985-04-10 1985-04-10 エアパルス発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7581985A JPS61236907A (ja) 1985-04-10 1985-04-10 エアパルス発生装置

Publications (2)

Publication Number Publication Date
JPS61236907A true JPS61236907A (ja) 1986-10-22
JPH0372843B2 JPH0372843B2 (enrdf_load_stackoverflow) 1991-11-20

Family

ID=13587170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7581985A Granted JPS61236907A (ja) 1985-04-10 1985-04-10 エアパルス発生装置

Country Status (1)

Country Link
JP (1) JPS61236907A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07279601A (ja) * 1994-04-04 1995-10-27 Shinano Electron:Kk ステッピングエアモータ及びそれを用いた半導体検査装置
WO2016063499A1 (ja) * 2014-10-22 2016-04-28 クロダニューマティクス株式会社 間歇エア発生装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07279601A (ja) * 1994-04-04 1995-10-27 Shinano Electron:Kk ステッピングエアモータ及びそれを用いた半導体検査装置
WO2016063499A1 (ja) * 2014-10-22 2016-04-28 クロダニューマティクス株式会社 間歇エア発生装置
TWI671484B (zh) * 2014-10-22 2019-09-11 日商科若達氣動股份有限公司 間歇空氣產生裝置

Also Published As

Publication number Publication date
JPH0372843B2 (enrdf_load_stackoverflow) 1991-11-20

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