JPH0371842U - - Google Patents
Info
- Publication number
- JPH0371842U JPH0371842U JP13124789U JP13124789U JPH0371842U JP H0371842 U JPH0371842 U JP H0371842U JP 13124789 U JP13124789 U JP 13124789U JP 13124789 U JP13124789 U JP 13124789U JP H0371842 U JPH0371842 U JP H0371842U
- Authority
- JP
- Japan
- Prior art keywords
- spindle shaft
- dicing
- vibration
- monitoring device
- blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012806 monitoring device Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Description
第１図ないし第３図は本考案によるスピンドル
軸の回転異常検知装置の一実施例を示す図であり
、第１図はその全体構成図、第２図は作動手順を
示すフローチヤート、第３図はモニタ波形図であ
る。
１……スピンドル軸、１ａ……フランジ部、２
……ダイシングブレード、２ａ……加工先端部、
３……本体、４……チヤツクテーブル、５，６…
…空気軸受、７……低摩擦ブロツク、８……回転
駆動部、８ａ……コイル、８ｂ……マグネツト、
１０……スピンドル構造、１２……振動センサ、
１３……センサホルダ、１３ａ……貫通孔、１５
……ボルト、１７……振動伝達軸、１７ａ……フ
ランジ部、１８……バネ、２０……監視回路（監
視手段）、Ｗ……ワーク。
1 to 3 are diagrams showing one embodiment of the spindle shaft rotation abnormality detection device according to the present invention, in which FIG. 1 is an overall configuration diagram thereof, FIG. 2 is a flowchart showing the operating procedure, and FIG. The figure is a monitor waveform diagram. 1...Spindle shaft, 1a...Flange part, 2
...Dicing blade, 2a...Processing tip,
3...Main body, 4...Chuck table, 5, 6...
...Air bearing, 7...Low friction block, 8...Rotary drive unit, 8a...Coil, 8b...Magnet,
10... Spindle structure, 12... Vibration sensor,
13...Sensor holder, 13a...Through hole, 15
... Bolt, 17 ... Vibration transmission shaft, 17a ... Flange section, 18 ... Spring, 20 ... Monitoring circuit (monitoring means), W ... Work.
Claims (1)
受により支持されて回転するスピンドル軸を備え
たダイシング装置において、前記スピンドル軸に
接触して振動を直接接触により検知するように設
けられ、回転時のスピンドル軸の振動を直接検知
する振動センサと、この振動センサからの信号に
より前記ダイシングブレードの実破断時の破損状
態を判別する監視手段とを設けたことを特徴とす
るブレード監視装置。 In a dicing device equipped with a spindle shaft which has a dicing blade attached to one end and rotates while being supported by an air bearing, the dicing device is provided so as to contact the spindle shaft and detect vibrations by direct contact, and the vibration of the spindle shaft during rotation is A blade monitoring device comprising: a vibration sensor that directly detects vibration; and a monitoring device that determines the state of damage when the dicing blade actually breaks based on a signal from the vibration sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13124789U JPH0753878Y2 (en) | 1989-11-10 | 1989-11-10 | Blade monitoring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13124789U JPH0753878Y2 (en) | 1989-11-10 | 1989-11-10 | Blade monitoring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0371842U true JPH0371842U (en) | 1991-07-19 |
| JPH0753878Y2 JPH0753878Y2 (en) | 1995-12-13 |
Family
ID=31678766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13124789U Expired - Lifetime JPH0753878Y2 (en) | 1989-11-10 | 1989-11-10 | Blade monitoring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0753878Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002239900A (en) * | 2000-10-06 | 2002-08-28 | Nagase Integrex Co Ltd | Grinding wheel driving method, dressing method and grinder used in the same |
| JP2009285804A (en) * | 2008-05-30 | 2009-12-10 | Genichi Sato | Cutting tool |
| JP2013035074A (en) * | 2011-08-03 | 2013-02-21 | Disco Corp | Cutting device |
-
1989
- 1989-11-10 JP JP13124789U patent/JPH0753878Y2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002239900A (en) * | 2000-10-06 | 2002-08-28 | Nagase Integrex Co Ltd | Grinding wheel driving method, dressing method and grinder used in the same |
| JP2009285804A (en) * | 2008-05-30 | 2009-12-10 | Genichi Sato | Cutting tool |
| JP2013035074A (en) * | 2011-08-03 | 2013-02-21 | Disco Corp | Cutting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0753878Y2 (en) | 1995-12-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0371842U (en) | ||
| JPH0371841U (en) | ||
| JPH03109764U (en) | ||
| JPH0365942U (en) | ||
| JPH074142Y2 (en) | Robot joint structure | |
| JP2587462Y2 (en) | Rotational position detector | |
| JPH0351355U (en) | ||
| JPH02110408U (en) | ||
| JPS60157196U (en) | Articulated robot | |
| JPS5920962Y2 (en) | Circular saw machine vibration isolator | |
| JPS60134591U (en) | Drive device with reducer in the working arm joint of automatic machinery | |
| JPH0321465Y2 (en) | ||
| JPH0347705U (en) | ||
| JPH02110480U (en) | ||
| JPH02117850U (en) | ||
| JPH0380670U (en) | ||
| JPH02116283U (en) | ||
| JPH02122560U (en) | ||
| JPH0255U (en) | ||
| JPS61166708U (en) | ||
| JPH024580U (en) | ||
| JPS6360548U (en) | ||
| JPS6383637U (en) | ||
| JPH0247144U (en) | ||
| JPH0187860U (en) |