JPH03109764U - - Google Patents

Info

Publication number
JPH03109764U
JPH03109764U JP13124889U JP13124889U JPH03109764U JP H03109764 U JPH03109764 U JP H03109764U JP 13124889 U JP13124889 U JP 13124889U JP 13124889 U JP13124889 U JP 13124889U JP H03109764 U JPH03109764 U JP H03109764U
Authority
JP
Japan
Prior art keywords
spindle shaft
dicing
blade
vibration
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13124889U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13124889U priority Critical patent/JPH03109764U/ja
Publication of JPH03109764U publication Critical patent/JPH03109764U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図ないし第3図は本考案によるブレード高
さ設定装置の一実施例を示す図であり、第1図は
その全体構成図、第2図は作動手順を示すフロー
チヤート、第3図はモニタ波形図、第4図は従来
のブレード高さ設定装置を示す全体構成図である
。 1……スピンドル軸、1a……フランジ部、2
……ダイシングブレード、3……本体、4……チ
ヤツクテーブル、5,6……空気軸受、7……摩
擦ブロツク、8……回転駆動部、8a……コイル
、8b……マグネツト、10……スピンドル構造
、12…振動センサ、13……センサホルダ、1
3a……貫通孔、15……ボルト、17……振動
伝達軸、17a……フランジ部、18……バネ、
20……接触検知回路(基準高さ判別手段)、2
1……メモリ、24……スピンドル上下駆動装置
、W……ワーク。
1 to 3 are diagrams showing an embodiment of the blade height setting device according to the present invention, in which FIG. 1 is an overall configuration diagram thereof, FIG. 2 is a flowchart showing the operating procedure, and FIG. The monitor waveform diagram in FIG. 4 is an overall configuration diagram showing a conventional blade height setting device. 1...Spindle shaft, 1a...Flange part, 2
...Dicing blade, 3...Main body, 4...Chuck table, 5, 6...Air bearing, 7...Friction block, 8...Rotary drive unit, 8a...Coil, 8b...Magnet, 10... ...Spindle structure, 12...Vibration sensor, 13...Sensor holder, 1
3a...Through hole, 15...Bolt, 17...Vibration transmission shaft, 17a...Flange portion, 18...Spring,
20...Contact detection circuit (reference height determination means), 2
1...Memory, 24...Spindle vertical drive device, W...Work.

補正 平3.5.22 図面の簡単な説明を次のように補正する。 明細書第15頁第11行目乃至第12行目の「
第4図は……全体構成図である。」を削除します
Amendment 3.5.22 The brief description of the drawing is amended as follows. "In the specification page 15, line 11 to line 12,"
FIG. 4 is an overall configuration diagram. ”.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 一端部にダイシングブレードを取付け、空気軸
受により支持されて回転するスピンドル軸を備え
たダイシング装置において、前記スピンドル軸に
接触して振動を直接接触により検知するように設
けられ、回転時にスピンドル軸の振動を直接検知
する振動センサと、この振動センサからの信号に
より前記ダイシングブレードの加工先端部がワー
クテーブルのワーク支持面と同じ高さに設定され
たか否かを判別する基準高さ判別手段とを設けた
ことを特徴とするブレード高さ設定装置。
In a dicing device equipped with a spindle shaft that has a dicing blade attached to one end and rotates while being supported by an air bearing, the dicing device is provided so as to contact the spindle shaft and detect vibrations by direct contact, and the vibration of the spindle shaft during rotation. and a reference height determining means for determining whether the processing tip of the dicing blade is set at the same height as the work supporting surface of the work table based on the signal from the vibration sensor. A blade height setting device characterized by:
JP13124889U 1989-11-10 1989-11-10 Pending JPH03109764U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13124889U JPH03109764U (en) 1989-11-10 1989-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13124889U JPH03109764U (en) 1989-11-10 1989-11-10

Publications (1)

Publication Number Publication Date
JPH03109764U true JPH03109764U (en) 1991-11-11

Family

ID=31678767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13124889U Pending JPH03109764U (en) 1989-11-10 1989-11-10

Country Status (1)

Country Link
JP (1) JPH03109764U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009248208A (en) * 2008-04-02 2009-10-29 Disco Abrasive Syst Ltd Contact detection mechanism of gas bearing
JP2017030064A (en) * 2015-07-29 2017-02-09 東京エレクトロン株式会社 Substrate processing device and substrate processing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009248208A (en) * 2008-04-02 2009-10-29 Disco Abrasive Syst Ltd Contact detection mechanism of gas bearing
JP2017030064A (en) * 2015-07-29 2017-02-09 東京エレクトロン株式会社 Substrate processing device and substrate processing method

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