JPH03109764U - - Google Patents
Info
- Publication number
- JPH03109764U JPH03109764U JP13124889U JP13124889U JPH03109764U JP H03109764 U JPH03109764 U JP H03109764U JP 13124889 U JP13124889 U JP 13124889U JP 13124889 U JP13124889 U JP 13124889U JP H03109764 U JPH03109764 U JP H03109764U
- Authority
- JP
- Japan
- Prior art keywords
- spindle shaft
- dicing
- blade
- vibration
- height
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Description
第１図ないし第３図は本考案によるブレード高
さ設定装置の一実施例を示す図であり、第１図は
その全体構成図、第２図は作動手順を示すフロー
チヤート、第３図はモニタ波形図、第４図は従来
のブレード高さ設定装置を示す全体構成図である
。
１……スピンドル軸、１ａ……フランジ部、２
……ダイシングブレード、３……本体、４……チ
ヤツクテーブル、５，６……空気軸受、７……摩
擦ブロツク、８……回転駆動部、８ａ……コイル
、８ｂ……マグネツト、１０……スピンドル構造
、１２…振動センサ、１３……センサホルダ、１
３ａ……貫通孔、１５……ボルト、１７……振動
伝達軸、１７ａ……フランジ部、１８……バネ、
２０……接触検知回路（基準高さ判別手段）、２
１……メモリ、２４……スピンドル上下駆動装置
、Ｗ……ワーク。
1 to 3 are diagrams showing an embodiment of the blade height setting device according to the present invention, in which FIG. 1 is an overall configuration diagram thereof, FIG. 2 is a flowchart showing the operating procedure, and FIG. The monitor waveform diagram in FIG. 4 is an overall configuration diagram showing a conventional blade height setting device. 1...Spindle shaft, 1a...Flange part, 2
...Dicing blade, 3...Main body, 4...Chuck table, 5, 6...Air bearing, 7...Friction block, 8...Rotary drive unit, 8a...Coil, 8b...Magnet, 10... ...Spindle structure, 12...Vibration sensor, 13...Sensor holder, 1
3a...Through hole, 15...Bolt, 17...Vibration transmission shaft, 17a...Flange portion, 18...Spring,
20...Contact detection circuit (reference height determination means), 2
1...Memory, 24...Spindle vertical drive device, W...Work.
補正 平３．５．２２
図面の簡単な説明を次のように補正する。
明細書第１５頁第１１行目乃至第１２行目の「
第４図は……全体構成図である。」を削除します
。Amendment 3.5.22 The brief description of the drawing is amended as follows. "In the specification page 15, line 11 to line 12,"
FIG. 4 is an overall configuration diagram. ”.
Claims (1)
受により支持されて回転するスピンドル軸を備え
たダイシング装置において、前記スピンドル軸に
接触して振動を直接接触により検知するように設
けられ、回転時にスピンドル軸の振動を直接検知
する振動センサと、この振動センサからの信号に
より前記ダイシングブレードの加工先端部がワー
クテーブルのワーク支持面と同じ高さに設定され
たか否かを判別する基準高さ判別手段とを設けた
ことを特徴とするブレード高さ設定装置。 In a dicing device equipped with a spindle shaft that has a dicing blade attached to one end and rotates while being supported by an air bearing, the dicing device is provided so as to contact the spindle shaft and detect vibrations by direct contact, and the vibration of the spindle shaft during rotation. and a reference height determining means for determining whether the processing tip of the dicing blade is set at the same height as the work supporting surface of the work table based on the signal from the vibration sensor. A blade height setting device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13124889U JPH03109764U (en) | 1989-11-10 | 1989-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13124889U JPH03109764U (en) | 1989-11-10 | 1989-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03109764U true JPH03109764U (en) | 1991-11-11 |
Family
ID=31678767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13124889U Pending JPH03109764U (en) | 1989-11-10 | 1989-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03109764U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009248208A (en) * | 2008-04-02 | 2009-10-29 | Disco Abrasive Syst Ltd | Contact detection mechanism of gas bearing |
| JP2017030064A (en) * | 2015-07-29 | 2017-02-09 | 東京エレクトロン株式会社 | Substrate processing device and substrate processing method |
-
1989
- 1989-11-10 JP JP13124889U patent/JPH03109764U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009248208A (en) * | 2008-04-02 | 2009-10-29 | Disco Abrasive Syst Ltd | Contact detection mechanism of gas bearing |
| JP2017030064A (en) * | 2015-07-29 | 2017-02-09 | 東京エレクトロン株式会社 | Substrate processing device and substrate processing method |
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