JPS61143805U - - Google Patents
Info
- Publication number
- JPS61143805U JPS61143805U JP1859385U JP1859385U JPS61143805U JP S61143805 U JPS61143805 U JP S61143805U JP 1859385 U JP1859385 U JP 1859385U JP 1859385 U JP1859385 U JP 1859385U JP S61143805 U JPS61143805 U JP S61143805U
- Authority
- JP
- Japan
- Prior art keywords
- blade
- jig
- piezoelectric element
- attached
- dicing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
Description
第１図は従来装置の側断面図、第２図は本願考
案の側断面図。
２１：スピンドル、２２：ケーシング、２３：
ブレード、２４：モータ、２５：テーブル、２６
：被加工物、２７：圧電素子、２８：電極。
FIG. 1 is a side sectional view of a conventional device, and FIG. 2 is a side sectional view of the present invention. 21: Spindle, 22: Casing, 23:
Blade, 24: Motor, 25: Table, 26
: Workpiece, 27: Piezoelectric element, 28: Electrode.
Claims (1)
ルの先端に取付けられたブレードにより、テーブ
ル上に載置された被加工物にダイシング加工を行
なうダイシングマシンにおいて、前記テーブルも
しくは前記テーブル上に設置される既知の寸法を
有する治具に、少なくとも１個の圧電素子を取付
け、前記ブレードが前記テーブルもしくは前記治
具に接触したときに生ずる前記圧電素子の出力信
号により、前記ブレードの位置検出を行なうこと
を特徴とするブレード位置検出装置。 In a dicing machine that performs dicing on a workpiece placed on a table with a blade attached to the tip of a rotating spindle supported by an air bearing, the table or a known dimension installed on the table At least one piezoelectric element is attached to a jig having a blade, and the position of the blade is detected based on an output signal of the piezoelectric element generated when the blade contacts the table or the jig. Blade position detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1859385U JPS61143805U (en) | 1985-02-13 | 1985-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1859385U JPS61143805U (en) | 1985-02-13 | 1985-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61143805U true JPS61143805U (en) | 1986-09-05 |
Family
ID=30507376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1859385U Pending JPS61143805U (en) | 1985-02-13 | 1985-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61143805U (en) |
-
1985
- 1985-02-13 JP JP1859385U patent/JPS61143805U/ja active Pending
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