JPH0197850U - - Google Patents
Info
- Publication number
- JPH0197850U JPH0197850U JP1987191551U JP19155187U JPH0197850U JP H0197850 U JPH0197850 U JP H0197850U JP 1987191551 U JP1987191551 U JP 1987191551U JP 19155187 U JP19155187 U JP 19155187U JP H0197850 U JPH0197850 U JP H0197850U
- Authority
- JP
- Japan
- Prior art keywords
- ingot
- cutting
- cutting resistance
- piezoelectric element
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009434 installation Methods 0.000 description 1
Description
第１図は本考案実施例によるインゴツト末端保
持装置の取付概要説明図、第２図は保持装置の平
面図である。
２……ブレード、３……インゴツト、５……末
端保持部、１３ａ……接触部、１５……圧電素子
。
FIG. 1 is a schematic illustration of the installation of an ingot end holding device according to an embodiment of the present invention, and FIG. 2 is a plan view of the holding device. 2... Blade, 3... Ingot, 5... End holding part, 13a... Contact part, 15... Piezoelectric element.
Claims (1)
の保持機構において、インゴツトとの接触部と保
持部との間に切削抵抗検出の圧電素子を設けてな
る切削抵抗測定装置。 A cutting resistance measuring device comprising a piezoelectric element for detecting cutting resistance provided between a contact part with an ingot and a holding part in a holding mechanism at the end of an ingot in a slicing machine for cutting a wafer.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987191551U JPH0197850U (en) | 1987-12-17 | 1987-12-17 | |
| US07/281,534 US4949700A (en) | 1987-12-17 | 1988-12-08 | Ingot support device in slicing apparatus |
| EP19880121117 EP0320972A3 (en) | 1987-12-17 | 1988-12-16 | Ingot support device in slicing apparatus |
| KR1019880016816A KR930004293B1 (en) | 1987-12-17 | 1988-12-17 | Ingot supporting apparatus of slicing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987191551U JPH0197850U (en) | 1987-12-17 | 1987-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0197850U true JPH0197850U (en) | 1989-06-29 |
Family
ID=31482456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987191551U Pending JPH0197850U (en) | 1987-12-17 | 1987-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0197850U (en) |
-
1987
- 1987-12-17 JP JP1987191551U patent/JPH0197850U/ja active Pending