JPH0371530A - Manufacture of plasma display panel - Google Patents

Abstract

PURPOSE:To easily manufacture a frontal substrate on which the position of a transparent electrode coincides with that of a black dielectric by using the black dielectric itself as a mask after it is formed, and by patterning the transparent electrode. CONSTITUTION:A material for black dielectric is printed on a frontal glass substrate 1 by screen-printing. It is then baked at a predetermined temperature so as to form a black dielectric layer 4, after which the frontal glass substrate 1 on which the black dielectric layer 4 is formed is transferred into an electric furnace, and is heated and moved to an evaporation chamber, while ternary chloride antimony is added to binary di-methyl tin and is heated and vaporized, and by transferring the vapor generated in the process into the evaporation chamber, along with heated air, a transparent conductive film 2 is obtained. On the transparent conductive film 2, a photo resist is applied, and is exposed with the black dielectric layer 4 formed prior thereto as a mask, and the transparent conductive film 2 on the black dielectric layer 4 is etched off, so as to form a transparent electrode 3 which is perfectly overlapped with the black dielectric layer 4.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a plasma display panel, and particularly to a method for forming a front substrate.

[Conventional technology]

In a plasma display panel, an electrode formed on a front glass substrate and an electrode formed on a rear glass substrate are opposed to each other via a rare gas that can be discharged, and the discharge light produced by the voltage applied to each electrode is displayed. This is the display I used. Among these, the dot matrix 2AC refresh type FDP consisting of X and Y electrodes has excellent display quality and high contrast ratio.
Its uses are becoming increasingly widespread. Now, a transparent electrode such as Sn○2 is used on the front substrate side of an AC refresh type PDP, and a black dielectric layer is placed between the transparent electrode and the transparent electrode in order to improve the contrast of the panel. They are formed in parallel stripes.

Conventionally, such a black dielectric layer and transparent electrode have been formed by the method shown in FIG. A conventional forming method will be explained using FIG. 3. First, as shown in FIG. 3(a), on the front glass substrate 1,
At temperatures below 0'C, i.e. 600°C to 650'
The transparent conductor [2] is coated over the entire surface by heating to a temperature of C. Next, unnecessary portions of the transparent conductive film 2 are etched by photolithography to form the transparent electrode 3 shown in FIG. 3(b). Thereafter, in order to increase the contrast ratio of the panel display surface, a black dielectric material is screen printed on the electrode gap of the transparent electrode 3, and this is fired to form a black dielectric material as shown in FIG. 3(C). It formed layer 4.

[Problem to be solved by the invention]

However, as display patterns become denser and more precise, when forming a black dielectric layer using the conventional method described above, there is a difference between the transparent electrode pattern on the glass substrate and the black dielectric layer pattern to be printed. It took a lot of time to align. In addition, as shown in FIG. 3(d), overall or local misalignment occurs and the transparent electrode 3
There is a problem in that the display dots are overlapped with the black dielectric layer, the display dots are substantially reduced, and the amount of light during lighting is reduced, resulting in a dark appearance. The reason for this is that photolithography is used to eliminate uneven expansion and contraction of the transparent electrode caused by uneven expansion and contraction of the glass substrate when the substrate is processed at relatively high temperatures (600°C to 650°C) during transparent electrode formation. This is because although the transparent electrode is patterned, a slight deviation may occur in the setting position of the glass substrate during exposure using a patterned film. This tendency becomes stronger as the density and definition increase, so in extreme cases, it was necessary to adjust the printing position of the dielectric layer on each glass substrate to match the transparent electrode pattern. . Therefore, overlaps due to misalignment as shown in FIG. 3(d') are often overlooked, and in severe cases, the brightness does not meet the standard and a large number of defective products are manufactured.

[Means to solve the problem]

The method for manufacturing a front substrate of a plasma display panel according to the present invention is to apply a black dielectric material to a transparent glass substrate in advance using a screen printing method or the like in a predetermined pattern (a pattern that is the inverse of the desired transparent electrode pattern).
The first step is to form a transparent conductive film on the entire surface of the glass substrate, and then apply a photoresist to the surface of the transparent conductive film. By exposing and etching the layer as a mask, the pattern-shaped transparent conductive film of the black dielectric layer that has not been exposed to light is removed, and a transparent electrode is formed between the black dielectric layers. .

〔Example〕

Next, the present invention will be explained with reference to the drawings. FIGS. 1(a) to 1(c) are cross-sectional views showing the formation process of the first embodiment of the present invention. First, as shown in Figure 1(a),
Front glass substrate 1 is made by screen printing a paste-like black dielectric material used at a firing temperature of 675±10°C.
Print on top. This printed pattern is an inverse pattern of the desired pattern of the transparent electrode 3. Next, the black dielectric layer 4 is formed by firing at a firing temperature (675±10"C). Thereafter, as shown in FIG. 1(b), the front glass substrate 1 with the black dielectric layer 4 formed thereon is heated Pour into the furnace and heat at 60
At the same time, it is heated to a temperature of 0°C to 650°C and transferred to the vapor deposition chamber, and about 1.5% antimony trichloride is mixed with dimethyltin dichloride, heated and vaporized, and these vapors are transferred to the vapor deposition chamber together with heated air. By feeding, the transparent conductive film 2 shown in FIG. 1(b) can be obtained. Next, transparent conductive M2
A photoresist is applied to the surface of the first layer, exposed using the previously formed black dielectric layer 4 as a mask, and the transparent conductive IIQ2 on the black dielectric layer N4 is removed by etching.
As shown in Figure (C), a transparent electrode 3 perfectly aligned with the black dielectric N4 could be formed.

FIGS. 2(a) to 2(c) are cross-sectional views showing the steps of forming a dielectric layer and a transparent electrode in a second embodiment of the present invention. First, as shown in Fig. 2(a), a black dielectric material made into a paste to be used at a firing temperature of 675±10°C is printed onto a transparent glass substrate 1'' by screen printing, and a black dielectric layer is formed. form 4. This printed pattern is an inverse pattern of the desired pattern of the transparent electrode 3. After drying this, further mix black dielectric material and Ag2O3 powder,
30-15 by screen printing paste
Print over the previous pattern with a thickness of about 0 μm,
Form channel 5. This print pattern is in the form of a stripe and is thinner than the black dielectric layer 4 printed previously, so that printing sag is taken into consideration. This is followed by firing at <675±10°C). After that, the first
Since this is the same as the embodiment, the explanation will be omitted. In this example, the barrier ribs between the discharge cells and the channel for creating the discharge gap, which are conventionally formed in the final process, are formed in the first process, so they are affected by the expansion and contraction of the substrate in the subsequent firing process. It has the advantage that it is possible to form a channel perfectly aligned with the transparent electrode without any interference. In addition, conventionally the channels were formed to intersect the electrodes at right angles, but by making them parallel to the electrodes as in this example, it is easier to align the front and rear glass substrates when assembling them. It has the advantage of reducing the number of man-hours required for alignment.

〔Effect of the invention〕

As explained above, the present invention uses the black dielectric layer itself as a mask after forming the black dielectric layer, whereas conventionally a black dielectric layer was screen printed in the gap between the transparent electrodes after forming the transparent electrode. By patterning the transparent electrode using photolithography, it is possible to easily manufacture a front substrate for a plasma display in which the positions of the transparent electrode and the black dielectric material are completely aligned.

Therefore, since alignment time is not required, cost reduction can be achieved, and since there is no overlap between the transparent electrode and the black dielectric material, it is possible to provide a plasma display panel with stable light intensity, that is, with improved quality. .

[Brief explanation of drawings]

FIGS. 1(a) to (c) are cross-sectional views showing the manufacturing process of the first embodiment of the present invention, and FIGS.
FIGS. 3(a) to 3(d) are cross-sectional views showing the manufacturing process of the example.
) is a sectional view showing a manufacturing process of a front substrate of a conventional plasma display panel. DESCRIPTION OF SYMBOLS 1... Front glass substrate, 2... Transparent conductive film (NESA film), 3... Transparent electrode, 4... Black dielectric layer, 5...
・CH “71”・ 1. Yu7, ;fj-J! Lt.
: n. Figure 7 Figure 2

Claims (1)

[Claims] A transparent glass having a large number of mutually parallel strip-shaped light-transmitting and conductive X electrodes and a mutually parallel strip-shaped dielectric layer having light-shielding and insulating properties formed between each of the X electrodes. A front substrate used as a substrate and a rear substrate having a large number of linear Y electrode groups parallel to each other are hermetically sealed so that the X electrode groups and Y electrode groups face each other to obtain a predetermined discharge gap. , a dischargeable rare gas is sealed inside, and the X
In the method for manufacturing a plasma display panel in which the intersection of the electrode group and the Y electrode group is a discharge space, the front substrate is formed by disposing a light-shielding and insulating dielectric material on a transparent glass substrate. A process of screen printing in the shape of an inverted pattern and baking to form a dielectric layer, forming a transparent conductive film on the entire surface of the glass substrate on which the dielectric layer is formed, and then photocoating the transparent conductive film on the transparent conductive film. A transparent electrode is formed between the dielectric layers by applying a resist and using the already formed dielectric layer itself as a mask to expose the glass substrate to light from the back side and then etching it. 1. A method of manufacturing a plasma display panel, characterized in that the plasma display panel is formed by a step of forming.