JPH0369176A - Metallic vapor laser device - Google Patents

Abstract

PURPOSE:To enable smooth and fast switching of a Brewster tube during maintenance by connecting a flange of a laser oscillation tube body and a flange of the Brewster tube flexibly through a connecting member and by fastening the flange of the Brewster tube and an electrode supporting flange through a fastening member removably. CONSTITUTION:In a metallic vapor laser device which is provided with a discharge tube 2 to contain a metallic vapor source 8 which is built in a laser oscillation tube body 1 and a pair of electrodes 3, 4 which are provided to both ends of the discharge tube 2 through electrode supporting flanges 5, 6 and produce plasma inside the discharge tube 2, and Brewster tubes 17, 18 provided outside the electrode supporting flanges 5, 6, flanges 11a, 14a of the laser oscillation tube body 1 and flanges 17a, 18a of Brewster tubes 17, 18 are connected flexibly by connecting members 29 to 35, and the flanges 17a, 18a of Brewster tubes 17, 18 and the electrode supporting flanges 5, 6 are fastened removably by a hinge-like fastening member 38. For example, said connecting member is composed of links 29, 32, connecting arms 31, 34 and connecting axes 30, 35.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a metal vapor laser device, and more particularly to a metal vapor laser device in which a metal vapor source can be easily replenished or inserted into a discharge tube.

(Prior Art) The configuration of a conventional metal vapor laser device will be described with reference to FIG. That is, a laser tube 2 as a heat-resistant discharge tube is housed in the center of the oscillation tube body 1. A positive electrode 3 and a negative electrode 4 are disposed facing each other at both ends of the laser tube 2, and these electrodes 3 and 4 are supported by electrode support flanges 5 and 6, respectively.
Pulse nipolar discharge is performed in the discharge space 7 formed between the two. At the bottom of the laser tube 2, a metal vapor source 8, for example copper grains, is arranged to generate metal vapor.

Further, a heat insulating layer 9 made of a material such as alumina fiber is formed around the outer periphery of the laser tube 2, and in order to secure and protect the heat insulating layer 9 in a predetermined position, a protective tube 1 made of quartz or the like is formed.
0 is provided on the outer periphery of the heat insulating layer 9. A protection tube 10,
A vacuum heat insulating chamber 12 is formed between it and an external vacuum container 11 disposed outside. The vacuum insulation chamber 12 and the discharge space 7 within the laser tube 2 are connected to an exhaust device 13 to maintain the interior in a vacuum state.

In addition, in order to insulate the positive electrode 3 and the negative electrode 4 and obtain a good discharge, a break tube 14 made of an insulating material such as ceramic or glass is interposed between the external vacuum vessel 11 and the electrode support flange 6. has been done.

On the outside of each electrode support flange 5.6 there is a blinister window 15. Brewster tube 17°18 with 16 is arranged, electrode support flange 5.6 and Brewster tube!
7. 18 are each removably tightened with bolts 19. A buffer gas supply source 20 is connected to the Brewster tube 18 . On both sides of the Blinister windows 15 and 16, output mirrors 22 forming a laser beam resonator 21 are installed.
and a total reflection mirror 23. each mirror 2
2.23 are respectively stands 24. It is attached to 25. Note that there is a sabot at the bottom of the oscillation tube body 1)25.
27 is connected, and supports 26, 27 and stands 24, 25 are placed and fixed on a surface plate 28. Also,
A pulse circuit 29 and a high voltage power supply 30 are connected between the electrode support flange 6 and the external vacuum vessel 11, and a pulse drive power supply 31 is connected to the pulse circuit 29.

To oscillate laser light, first operate the exhaust device 13 to evacuate the vacuum insulation chamber 12 and the discharge space 7, and then supply Ne into the discharge space 7 from the buffer gas supply source 20.
A buffer gas such as the following is introduced to maintain a constant internal pressure.

In this state, the high voltage power supply 30. When the pulse circuit 29 and the pulse drive power supply 31 are started, a pulsed high voltage is applied between the anode 3 and the cathode 4, and discharge plasma is generated in the discharge space 7. The floating metal vapor collides with the free electrons in this discharge plasma, and the metal vapor is excited.
Laser light of a predetermined wavelength is generated when the excited metal vapor transitions to a lower energy level. The laser light generated in the discharge space 7 passes through the pre-discharger windows 15 and 16, and further increases its amplitude while being reflected by the output mirror 22 and the total reflection mirror 23 that constitute the laser light resonator 21.
The output mirror 22 oscillates.

(Problem to be Solved by the Invention) When a metal vapor laser device is operated, metal vapor in the laser tube 2 and other impurities adhere to the electrodes 3 and 4 or the vicinity thereof, causing abnormal discharge or a decrease in output. do. Therefore, it is necessary to periodically remove impurities attached to the electrodes 3, 4 or their vicinity. However, as mentioned above, since the electrodes 3 and 4 are inserted across the Brewster tube 17 and 18, maintenance work such as cleaning, repairing, replacing the electrodes 3 and 4, and loading a metal vapor source is not necessary. Brewster tube 17, which is each tightened to the electrode support flanges 5, 6 by a plurality of bolts 19.
18 must be removed. Then, after removing the Brewster tube 17.18, impurities adhering to the electrode and its vicinity are removed, and the electrode support flange 5.6 is attached to the Brewster tube 17. 18 must be bolted and fixed and assembled.

As described above, there is a problem in that the time required for the maintenance work of disassembling and reassembling becomes long.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a metal vapor laser device that can smoothly and quickly open and close a Brewster tube during electrode maintenance work.

[Structure of the Invention] (Means for Solving the Problems) The present invention includes a discharge tube that accommodates a metal vapor source built into a laser oscillation tube body, and electrode support flanges provided at both ends of the discharge tube. In a metal vapor laser device comprising a pair of electrodes for generating plasma in the discharge tube and a Brewster tube provided outside the electrode support flange, a flange of the laser oscillation tube body and a flange of the Brewster tube are bendably connected by a connecting member, and the flange of the Brewster tube and the electrode support flange are removably tightened by a tightening member.

(Function) During normal operation of the laser device, the electrode support flange and the flange of the Brewster tube are tightened by a hinge-like tightening member and are fixed by pressure contact in the axial direction. When disassembling for maintenance, which involves stopping the operation of the laser device and removing impurities adhering to the electrode and its vicinity, loosen the wing nut of the tightening member, remove the tightening member, and then pull out the Brewster tube. During this pulling operation, the connecting member is extended and the press-fixed state between the flange of the Brewster tube and the electrode support flange is released, the electrode is exposed, and impurities in and around the electrode can be removed. In addition, when the laser device is to be operated again, the operations performed in the disassembly are reversed.

This operation can significantly reduce maintenance and work time.

(Example) An example of a metal vapor laser device according to the present invention will be described with reference to FIGS. 1 to 5.

Since the present invention relates to the attachment/detachment mechanism of the flange of the laser oscillator main body, the electrode support flange, and the flange of the Brewster tube, the same parts as those shown in FIG. The explanation of the part that does is omitted.

That is, in FIG. 1, the right flange l of the external vacuum vessel 11 provided at the outermost circumference of the laser oscillation tube main body
As shown in FIGS. 2 and 3, a triangular first link 29 is attached to la. This I-th link 29 is provided with a first connecting shaft 30, and a first connecting arm 31 is pivotally attached to this first connecting shaft 30. On the other hand, a second link 32 is attached to the flange 17a of the Brewster tube 17, a second connecting shaft 33 is provided on this second link 32, and a second connecting shaft 33 is provided on this second link 32. A connecting arm 34 is pivotally mounted. This second connection arm 34 and the first connection arm 31 are connected to the third connection shaft 3
5, and are connected to each other in a flexible manner. 1st link 2
9. First connecting shaft 30. First connection arm 31, third connection shaft 35, second connection arm 34, second connection shaft 33
and the second link 32 are each a connecting member, and are connected so as to be flexible with the axis as a fulcrum.

Tapered surfaces 36. 37 are formed respectively, and a tightening ring 38 as a hinge-like tightening member is provided so as to bridge these tapered surfaces 36 and 37, and integrally connects the flange 17a of the Brewster tube 17 and the electrode support flange 5. It is tightened. As shown in an enlarged view in FIG. 4, this tightening ring 38 has one end of semicircular strips 39.40 connected to a hinge 46 into which a mandrel 45 is inserted, and these semicircular strips 39.40 Brewster tube 17
The electrode support flange 5 has an inner diameter that embraces the outer surfaces of the flange 17a and the electrode support flange 5. Further, the lower semicircular strip 40 is provided with a tightening screw 42 connected by a connecting shaft 41, and the upper semicircular strip 39 has a hole 43 through which the tightening screw 42 passes. Brewster tube 17 by tightening the tightening screw 42 at 44
The flange 17a and the electrode support flange 5 are integrated and fixed.

The left flange 14a of the outer vacuum vessel 11 and the right flange +4b of the break pipe 14 are hermetically connected by bolts (not shown), and the left flange 14a is hermetically connected to the electrode support flange 6. The tightening structure of the flange 18a of the left Brewster tube 18, the electrode support flange 6, and the flange of the break tube 14 is the same as the tightening structure of the right Brewster tube 17 described above, so the same parts are given the same reference numerals and are duplicated. The explanation of the part that does is omitted.

In the metal vapor laser device having the above configuration, during normal operation, the flange lla of the external vacuum vessel 11 and the flange 14a of the break tube I4 are located at both ends of the laser oscillator main body 1, as shown in FIGS. 1 to 4. and fix the electrode support flanges 5, 6 and the flanges 17a, 18a of the Brewster tube 17.18. electrode support flanges 5, 6 and flange 17a of Brewster tube 17°18;
18a is achieved by a tightening ring 38. That is, semicircular strips 39, 40 are tightened by wing nuts 44. The inner surfaces of the semicircular strips 39, 40 are tapered surfaces 36. formed on the flanges 5, 6, 17a, 18a.
It is formed into a V-shape so that it can match with 37. Therefore, by rotating the wing nut 44 to the tightening side, the flanges 5.17a and 6. 18a is brought together on the inner surface of the semicircular strip 39.4[1, and is fixed by being pressed in the axial direction.

On the other hand, electrode flange 5.6 and Brewster tube 17°18
FIG. 5 shows a state in which the flanges 17a and 18a are disassembled. That is, the wing nut 44 is loosened and the semicircular strips 39, 40 are removed. Thereafter, the tightening ring 38 is removed, and the Brewster tubes 17 and 18, which are bendably connected by the connecting member, are released from the pressed and fixed state, and the hinge 46
The Brewster tube I7.18 can be opened by. In this way, the disassembled state shown in FIG. 5 is obtained, and in this state maintenance work such as removing impurities adhering to the electrode and its vicinity and replacing and loading the metal vapor source can be easily performed. Note that the electrode flange 5.
If you want to attach the Brewster tube to 6, just do the reverse of the disassembly.

[Effects of the Invention] According to the present invention, the opening and closing operations of the Brewster tube can be performed easily and in a short time without the need to remove and disassemble the laser oscillation tube body and the Brewster tube each time by removing a large number of bolts as in the past. As a result, maintenance time can be significantly reduced.

[Brief explanation of drawings]

FIG. 1 is a longitudinal cross-sectional view showing one embodiment of a metal vapor laser device according to the present invention, FIG. 2 is a rear view of FIG. 1, FIG. 3 is a top view of FIG. 1, and FIG. Figure 5 is the front view of Figure 1.
FIG. 6 is a side view partially showing the open state of the Brewster tube in the figure, and FIG. 6 is a longitudinal sectional view showing a conventional metal vapor laser device. 1... Oscillator tube body 2... Laser tube 3... Anode electrode 4... Cathode electrode 5.6... Electrode support flange 7... Discharge space 8... Metal vapor source 9...・Insulation layer 0...Protection tube 1...External vacuum container 2...Vacuum insulation chamber 3...Exhaust device 4...Break tube 5.16...Pris star window 7.18... Brewster tube 9... Bolt 20... Buffer gas supply source 21... Laser light resonator 22, 23... Mirrors 24, 25... Stands 26, 27... Support 28... Fixed Panel 29...First link 30...First connection shaft 31...First connection arm 32...Second link 33...Second connection shaft 34...Second Connection arm 35...Third connection shaft 36, 37...Tapered surface 38...Tightening ring 39, 40...Semicircular strip 41...Connection shaft 42...Tightening screw 43... ... Hole 44 ... Butterfly nut 45 ... Mandrel 46 ... Hinge (8733) Agent: Yoshiaki Inomata, patent attorney (and others)
1 person)

Claims (1)

[Claims] A discharge tube that accommodates a metal vapor source built into a laser oscillation tube body, a pair of electrodes that are provided at both ends of the discharge tube via electrode support flanges to generate plasma in the discharge tube, and the electrode support flange In the metal vapor laser device, the flange of the laser oscillation tube body and the flange of the Brewster tube are bendably connected by a connecting member, and the flange of the Brewster tube is provided on the outside of the Brewster tube. A metal vapor laser device characterized in that a flange and the electrode support flange are removably fastened together by a hinge-like fastening member.