JPH0369058B2 - - Google Patents
Info
- Publication number
- JPH0369058B2 JPH0369058B2 JP13067883A JP13067883A JPH0369058B2 JP H0369058 B2 JPH0369058 B2 JP H0369058B2 JP 13067883 A JP13067883 A JP 13067883A JP 13067883 A JP13067883 A JP 13067883A JP H0369058 B2 JPH0369058 B2 JP H0369058B2
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- mirror
- speed
- scanning mechanism
- dynamic balance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 54
- 230000003287 optical effect Effects 0.000 claims description 7
- 230000010363 phase shift Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 238000002405 diagnostic procedure Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
- G01J3/453—Interferometric spectrometry by correlation of the amplitudes
- G01J3/4535—Devices with moving mirror
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
- Vibration Prevention Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13067883A JPS6022633A (ja) | 1983-07-18 | 1983-07-18 | フ−リエ分光器の高速ミラ−走査機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13067883A JPS6022633A (ja) | 1983-07-18 | 1983-07-18 | フ−リエ分光器の高速ミラ−走査機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6022633A JPS6022633A (ja) | 1985-02-05 |
JPH0369058B2 true JPH0369058B2 (ru) | 1991-10-30 |
Family
ID=15039993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13067883A Granted JPS6022633A (ja) | 1983-07-18 | 1983-07-18 | フ−リエ分光器の高速ミラ−走査機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6022633A (ru) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62254023A (ja) * | 1986-04-25 | 1987-11-05 | Santetsuku Kk | 波長分散測定方法及びその装置 |
JP2000234906A (ja) * | 1999-02-15 | 2000-08-29 | Koji Masutani | 反射部材移動装置および前記反射部材移動装置を使用する光路長周期的増減装置 |
JP5955574B2 (ja) * | 2012-02-03 | 2016-07-20 | 株式会社東光高岳 | 立体形状計測装置 |
-
1983
- 1983-07-18 JP JP13067883A patent/JPS6022633A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6022633A (ja) | 1985-02-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6587196B1 (en) | Oscillating mechanism driven monochromator | |
JP2510457B2 (ja) | マイケルソン干渉計 | |
EP2246662B1 (en) | Gyroscope utilizing MEMS and optical sensing | |
Brosens | Dynamic mirror distortions in optical scanning | |
JP2000514556A (ja) | 干渉計 | |
US5196902A (en) | Two-beam interferometer apparatus and method, and spectrometer utilizing the same | |
US5148235A (en) | Michelson interferometer for producing optical path differences by rotating corner cube retroreflectors | |
US9557221B1 (en) | Interferometer for Fourier transform infrared spectrometry | |
US5349438A (en) | Structure for the dynamic support of a reflective element and interferometer comprising the same | |
JPH0369058B2 (ru) | ||
US6124961A (en) | Scanner | |
US4536087A (en) | Dither compensator for ring laser gyroscope | |
US5457529A (en) | Rotating mirror interferometer | |
US6124929A (en) | Michelson interferometer with orbiting retroreflector | |
CN101251420A (zh) | 新型双动镜干涉仪 | |
JPS60157027A (ja) | マイケルソン原理による干渉計 | |
SU641299A1 (ru) | Резонансна машина дл испытани пружин на усталость | |
Duma et al. | Theoretical approach on a galvanometric scanner with an enhanced duty cycle | |
JP3639655B2 (ja) | 差動光路干渉計及びこの差動光路干渉計を用いたフーリエ変換分光器 | |
JPS6061614A (ja) | 光共振器の固有共振周波数の相違を測定する装置 | |
US5588632A (en) | Dynamic support structure | |
JP2610633B2 (ja) | 干渉計構造体の取り付け装置および方法 | |
EP0538344A1 (en) | Velocimeter | |
US20220098028A1 (en) | System and method of continuous, vibration-less, and bi-directional MEMS mirror motion via periodic driving force for rapid data acquisition | |
JP3327638B2 (ja) | 回転型干渉計 |