JPH0367060U - - Google Patents
Info
- Publication number
- JPH0367060U JPH0367060U JP12941389U JP12941389U JPH0367060U JP H0367060 U JPH0367060 U JP H0367060U JP 12941389 U JP12941389 U JP 12941389U JP 12941389 U JP12941389 U JP 12941389U JP H0367060 U JPH0367060 U JP H0367060U
- Authority
- JP
- Japan
- Prior art keywords
- trap
- vacuum vessel
- sputtering
- exhaust
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12941389U JPH0367060U (enrdf_load_stackoverflow) | 1989-11-06 | 1989-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12941389U JPH0367060U (enrdf_load_stackoverflow) | 1989-11-06 | 1989-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0367060U true JPH0367060U (enrdf_load_stackoverflow) | 1991-06-28 |
Family
ID=31677042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12941389U Pending JPH0367060U (enrdf_load_stackoverflow) | 1989-11-06 | 1989-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0367060U (enrdf_load_stackoverflow) |
-
1989
- 1989-11-06 JP JP12941389U patent/JPH0367060U/ja active Pending
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