JPH0367060U - - Google Patents

Info

Publication number
JPH0367060U
JPH0367060U JP12941389U JP12941389U JPH0367060U JP H0367060 U JPH0367060 U JP H0367060U JP 12941389 U JP12941389 U JP 12941389U JP 12941389 U JP12941389 U JP 12941389U JP H0367060 U JPH0367060 U JP H0367060U
Authority
JP
Japan
Prior art keywords
trap
vacuum vessel
sputtering
exhaust
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12941389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12941389U priority Critical patent/JPH0367060U/ja
Publication of JPH0367060U publication Critical patent/JPH0367060U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12941389U 1989-11-06 1989-11-06 Pending JPH0367060U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12941389U JPH0367060U (enrdf_load_stackoverflow) 1989-11-06 1989-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12941389U JPH0367060U (enrdf_load_stackoverflow) 1989-11-06 1989-11-06

Publications (1)

Publication Number Publication Date
JPH0367060U true JPH0367060U (enrdf_load_stackoverflow) 1991-06-28

Family

ID=31677042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12941389U Pending JPH0367060U (enrdf_load_stackoverflow) 1989-11-06 1989-11-06

Country Status (1)

Country Link
JP (1) JPH0367060U (enrdf_load_stackoverflow)

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