JPH0366636U - - Google Patents
Info
- Publication number
- JPH0366636U JPH0366636U JP12579489U JP12579489U JPH0366636U JP H0366636 U JPH0366636 U JP H0366636U JP 12579489 U JP12579489 U JP 12579489U JP 12579489 U JP12579489 U JP 12579489U JP H0366636 U JPH0366636 U JP H0366636U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- pump
- vacuum
- preliminary chamber
- preliminary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims 2
- 238000004544 sputter deposition Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12579489U JPH0366636U (el) | 1989-10-27 | 1989-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12579489U JPH0366636U (el) | 1989-10-27 | 1989-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0366636U true JPH0366636U (el) | 1991-06-28 |
Family
ID=31673644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12579489U Pending JPH0366636U (el) | 1989-10-27 | 1989-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0366636U (el) |
-
1989
- 1989-10-27 JP JP12579489U patent/JPH0366636U/ja active Pending