JPH0325231U - - Google Patents
Info
- Publication number
- JPH0325231U JPH0325231U JP8600889U JP8600889U JPH0325231U JP H0325231 U JPH0325231 U JP H0325231U JP 8600889 U JP8600889 U JP 8600889U JP 8600889 U JP8600889 U JP 8600889U JP H0325231 U JPH0325231 U JP H0325231U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- chamber
- room
- adjusted
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Electrodes Of Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8600889U JPH0325231U (el) | 1989-07-21 | 1989-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8600889U JPH0325231U (el) | 1989-07-21 | 1989-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0325231U true JPH0325231U (el) | 1991-03-15 |
Family
ID=31635416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8600889U Pending JPH0325231U (el) | 1989-07-21 | 1989-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325231U (el) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008285801A (ja) * | 2007-05-18 | 2008-11-27 | Tanizawa Seisakusho Ltd | ヘルメット |
| KR101426160B1 (ko) * | 2012-11-30 | 2014-08-01 | 한국교통대학교산학협력단 | 구명용 모자 |
-
1989
- 1989-07-21 JP JP8600889U patent/JPH0325231U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008285801A (ja) * | 2007-05-18 | 2008-11-27 | Tanizawa Seisakusho Ltd | ヘルメット |
| KR101426160B1 (ko) * | 2012-11-30 | 2014-08-01 | 한국교통대학교산학협력단 | 구명용 모자 |