JPH02122182U - - Google Patents
Info
- Publication number
- JPH02122182U JPH02122182U JP2971589U JP2971589U JPH02122182U JP H02122182 U JPH02122182 U JP H02122182U JP 2971589 U JP2971589 U JP 2971589U JP 2971589 U JP2971589 U JP 2971589U JP H02122182 U JPH02122182 U JP H02122182U
- Authority
- JP
- Japan
- Prior art keywords
- load lock
- lock chamber
- dry pump
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2971589U JPH02122182U (el) | 1989-03-17 | 1989-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2971589U JPH02122182U (el) | 1989-03-17 | 1989-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122182U true JPH02122182U (el) | 1990-10-05 |
Family
ID=31254163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2971589U Pending JPH02122182U (el) | 1989-03-17 | 1989-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122182U (el) |
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1989
- 1989-03-17 JP JP2971589U patent/JPH02122182U/ja active Pending