JPH0365932U

JPH0365932U -

Info

Publication number: JPH0365932U
Application number: JP12630489U
Authority: JP
Priority date: 1989-10-28
Filing date: 1989-10-28
Publication date: 1991-06-26
Anticipated expiration: 2004-10-28
Also published as: JPH088426Y2

Description

[Brief explanation of drawings]

第１〜７図は本考案の実施例を示し、第１図は
第１実施例の平面図、第２図は第２実施例の平面
図、第３図は第３実施例の平面図、第４図は第４
実施例の平面図、第５図は第５実施例の平面図、
第６図は第６実施例の平面図、第７図は第７実施
例の平面図、第８図と第９図はそれぞれ異なつた
従来例の二光束干渉計の平面図である。１……レバー、１ａ……第１レバー、２……支
軸、３……圧電体セラミツクス、６……ばね、１
１……第２レバー、１２……支軸、１５……板状
連結片、１５ａ……第１板状連結片、１６……第
２板状連結片。 1 to 7 show embodiments of the present invention, FIG. 1 is a plan view of the first embodiment, FIG. 2 is a plan view of the second embodiment, FIG. 3 is a plan view of the third embodiment, Figure 4 is the fourth
A plan view of the embodiment, FIG. 5 is a plan view of the fifth embodiment,
FIG. 6 is a plan view of the sixth embodiment, FIG. 7 is a plan view of the seventh embodiment, and FIGS. 8 and 9 are plan views of different conventional two-beam interferometers. DESCRIPTION OF SYMBOLS 1... Lever, 1a... First lever, 2... Support shaft, 3... Piezoelectric ceramics, 6... Spring, 1
DESCRIPTION OF SYMBOLS 1... Second lever, 12... Support shaft, 15... Plate-shaped connecting piece, 15a... First plate-shaped connecting piece, 16... Second plate-shaped connecting piece.

Claims

[Claims for Utility Model Registration] (1) A lever that rotates together with a spindle, a piezoelectric ceramic that supports the lever in the direction of rotation at a position away from the spindle, and a piezoelectric ceramic that supports the lever in the direction of rotation. A driving device for a two-beam interferometer, comprising a biasing means for biasing the piezoelectric ceramic, and driving a movable body of the two-beam interferometer by rotation of a support shaft caused by expansion and contraction of the piezoelectric ceramic. (2) a first lever whose end is supported by a spindle; a piezoelectric ceramic that supports the first lever in the rotation direction at a position away from the spindle; and a piezoelectric ceramic that is rotatable together with the spindle; The position away from the spindle is the first
It consists of a second lever supported at the point of action of the lever, and a biasing means for biasing the second lever in the direction of contraction of the piezoelectric ceramic. A two-beam interferometer drive device that dynamically drives the movable body of the two-beam interferometer. (3) A lever that rotates together with the spindle, a piezoelectric ceramic placed at a position away from the spindle on the side in the rotation direction of the lever, and a piezoelectric ceramic that connects the lever and the piezoelectric ceramic. It consists of a plate-like connecting piece that is elastically deformable and fixed at each end, and the plate-like connecting piece is fixed with its surface parallel to the axis of the support, and the support shaft is formed by expansion and contraction of the piezoelectric ceramic. A driving device for a two-beam interferometer that drives the movable body of the two-beam interferometer by rotation. (4) A first lever whose end is supported by a support shaft, a piezoelectric ceramic placed at a position away from the support shaft on the rotation direction side of the first lever, and a piezoelectric ceramic placed in the same direction as the first lever. a second lever that rotates together with the support shaft;
In order to connect the first lever and the piezoelectric ceramic, a first plate-shaped connection piece that is elastically deformable and has each end fixed thereto, and in order to connect the point of action of the first lever and the second lever, and a second elastically deformable plate-like connecting piece having each end fixed to the plate-like connecting piece, and each of the first and second plate-like connecting pieces has its surface parallel to the axis of the spindle. A drive device for a two-beam interferometer that is fixed to the second lever and drives a movable body of the two-beam interferometer by rotation of a support shaft of the second lever. (5) A lever whose base is supported by a spindle, a piezoelectric ceramic that supports the lever in the direction of rotation at a position away from the spindle, and an urging force that urges the lever toward the piezoelectric ceramic. A drive device for a two-beam interferometer, comprising means for driving a movable body of the two-beam interferometer by rotation of a lever due to expansion and contraction of the piezoelectric ceramic. (6) In order to connect a lever whose base is supported by a support shaft, a piezoelectric ceramic placed at a position away from the support shaft on the rotation direction side of the lever, and the lever and the piezoelectric ceramic, It consists of an elastically deformable plate-like connecting piece fixed at each end thereof, and the plate-like connecting piece is fixed with its surface parallel to the axis of the support shaft, and the lever is formed by the expansion and contraction of piezoelectric ceramics. A driving device for a two-beam interferometer that drives the movable body of the two-beam interferometer by rotation.