JPH0365246U

JPH0365246U -

Info

Publication number: JPH0365246U
Application number: JP12705589U
Authority: JP
Priority date: 1989-10-30
Filing date: 1989-10-30
Publication date: 1991-06-25

Description

[Brief explanation of drawings]

第１図ａ，ｂは本考案の実施例を示す要部構成
図であり、同図ａはテストヘツドの概略の断面図
、及び同図ｂは外部接続治具の斜面図、第２図は
従来の試験装置の構成図、第３図は第２図中のテ
ストヘツド及びプローバの概略の断面図、第４図
は第１図の装置状態を示す概略の斜視図である。１……テスタ、１０……テストヘツド、１１ａ
……貫通孔、１２……マザーボード、１３……フ
アミリーボード、１４……コンタクトピン、１５
……ピンカード、１６，１７……第１、第２の端
子、２０……プローバ、２２……コンタクトボー
ド、２６……プローブカード、３０……ウエハ、
４０……チエツク用端子、５０……外部接続治具
、５１……端子板、５３……コンタクト。 1A and 1B are main part configuration diagrams showing an embodiment of the present invention, FIG. 1A is a schematic sectional view of the test head, FIG. 3 is a schematic sectional view of the test head and prober in FIG. 2, and FIG. 4 is a schematic perspective view showing the state of the apparatus in FIG. 1. 1...Tester, 10...Test head, 11a
...Through hole, 12...Mother board, 13...Family board, 14...Contact pin, 15
... Pin card, 16, 17 ... First and second terminals, 20 ... Prober, 22 ... Contact board, 26 ... Probe card, 30 ... Wafer,
40...Check terminal, 50...External connection jig, 51...Terminal board, 53...Contact.

Claims

[Scope of Utility Model Registration Claim] A tester for measuring the electrical characteristics of a test object made of electronic components, a plurality of contact pins protruding around the lower end of an observation through hole, and a plurality of pins inside. The prober includes a tester head in which a card is housed, and a prober that is removably brought into close contact with the contact pins via a plurality of pads and comes into contact with the terminals of the product under test to perform an electrical characteristic test on the product under test. , each pin card has a measurement circuit, and the measurement circuit is connected to the tester side via a plurality of first terminals and to the contact pin via a plurality of second terminals. In the test device, a plurality of check terminals connected to the plurality of second terminals are protruded into the through hole, and connected to a terminal board placed on the upper end of the through hole and the terminal board. and a plurality of contacts that are removably connected to the second terminal, and an external connection jig that is removably attached to the tester head.